Junji Oikawa

Person

Nirasaki City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Transfer chamber and method for preventing adhesion of particle
- Patent number 10,115,614
- Issue date Oct 30, 2018
- Tokyo Electron Limited
- Jun Yamawaku
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer chamber and method for preventing adhesion of particle
- Patent number 9,385,015
- Issue date Jul 5, 2016
- Tokyo Electron Limited
- Jun Yamawaku
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer device and substrate transfer method
- Patent number 8,409,328
- Issue date Apr 2, 2013
- Tokyo Electron Limited
- Jun Yamawaku
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and exhaust method therefor
- Patent number 8,398,745
- Issue date Mar 19, 2013
- Tokyo Electron Limited
- Jun Yamawaku
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
TRANSFER CHAMBER AND METHOD FOR PREVENTING ADHESION OF PARTICLE
- Publication number 20160315001
- Publication date Oct 27, 2016
- TOKYO ELECTRON LIMITED
- Jun YAMAWAKU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COOLING UNIT, PROCESSING CHAMBER, PART IN THE PROCESSING CHAMBER, A...
- Publication number 20120204576
- Publication date Aug 16, 2012
- TOKYO ELECTRON LIMITED
- Kazuyoshi MATSUZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATMOSPHERE CLEANING DEVICE
- Publication number 20110090612
- Publication date Apr 21, 2011
- TOKYO ELECTRON LIMITED
- Junji Oikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND EXHAUST METHOD THEREFOR
- Publication number 20100236406
- Publication date Sep 23, 2010
- TOKYO ELECTRON LIMITED
- Jun YAMAWAKU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER DEVICE AND SUBSTRATE TRANSFER METHOD
- Publication number 20100236405
- Publication date Sep 23, 2010
- TOKYO ELECTRON LIMITED
- Jun YAMAWAKU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CHARGE-NEUTRALIZING TARGET SUBSTRATE AND SUBSTRATE PROCE...
- Publication number 20100214712
- Publication date Aug 26, 2010
- TOKYO ELECTRON LIMITED
- Jun YAMAWAKU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER CHAMBER AND METHOD FOR PREVENTING ADHESION OF PARTICLE
- Publication number 20100202093
- Publication date Aug 12, 2010
- TOKYO ELECTRON LIMITED
- Jun YAMAWAKU
- H01 - BASIC ELECTRIC ELEMENTS

Junji Oikawa

Person

Patents Grantslast 30 patents

Transfer chamber and method for preventing adhesion of particle

Transfer chamber and method for preventing adhesion of particle

Substrate transfer device and substrate transfer method

Substrate processing apparatus and exhaust method therefor

Patents Applicationslast 30 patents

TRANSFER CHAMBER AND METHOD FOR PREVENTING ADHESION OF PARTICLE

COOLING UNIT, PROCESSING CHAMBER, PART IN THE PROCESSING CHAMBER, A...

ATMOSPHERE CLEANING DEVICE

SUBSTRATE PROCESSING APPARATUS AND EXHAUST METHOD THEREFOR

SUBSTRATE TRANSFER DEVICE AND SUBSTRATE TRANSFER METHOD

METHOD FOR CHARGE-NEUTRALIZING TARGET SUBSTRATE AND SUBSTRATE PROCE...

TRANSFER CHAMBER AND METHOD FOR PREVENTING ADHESION OF PARTICLE