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Junji Watanabe
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Kumamoto, JP
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last 30 patents
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Patent Grant
Substrate, method of polishing the same, and polishing apparatus
Patent number
8,008,203
Issue date
Aug 30, 2011
National Universtiy Corporation Kumamoto University
Junji Watanabe
B24 - GRINDING POLISHING
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last 30 patents
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Patent Application
Substrate, method of polishing the same, and polishing apparatus
Publication number
20090050897
Publication date
Feb 26, 2009
Junji Watanabe
B24 - GRINDING POLISHING