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Junjun Liu
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Austin, TX, US
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Patents Grants
last 30 patents
Information
Patent Grant
Fabrication methods for nanodelivery systems for long term controll...
Patent number
11,103,460
Issue date
Aug 31, 2021
Board of Regents, The University of Texas System
Paul S. Ho
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information
Patent Grant
Method and hardware for enhanced removal of post etch polymer and h...
Patent number
10,347,503
Issue date
Jul 9, 2019
Tokyo Electron Limited
Ian J. Brown
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for removing back-filled pore-filling agent from a cured por...
Patent number
10,147,640
Issue date
Dec 4, 2018
Tokyo Electron Limited
Junjun Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-step system and method for curing a dielectric film
Patent number
10,068,765
Issue date
Sep 4, 2018
Tokyo Electron Limited
Junjun Liu
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Multi-step system and method for curing a dielectric film
Patent number
9,443,725
Issue date
Sep 13, 2016
Tokyo Electron Limited
Junjun Liu
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Multi-step system and method for curing a dielectric film
Patent number
9,184,047
Issue date
Nov 10, 2015
Tokyo Electron Limited
Junjun Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for integrating low-k dielectrics
Patent number
9,017,933
Issue date
Apr 28, 2015
Tokyo Electron Limited
Junjun Liu
B08 - CLEANING
Information
Patent Grant
Thermal processing system for curing dielectric films
Patent number
8,956,457
Issue date
Feb 17, 2015
Tokyo Electron Limited
Eric M. Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dielectric treatment module using scanning IR radiation source
Patent number
8,895,942
Issue date
Nov 25, 2014
Tokyo Electron Limited
Junjun Liu
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Multi-step system and method for curing a dielectric film
Patent number
8,642,488
Issue date
Feb 4, 2014
Tokyo Electron Limited
Junjun Liu
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Electrochemical substrate slicing using electromagnetic wave excita...
Patent number
8,444,848
Issue date
May 21, 2013
Tokyo Electron Limited
Hongyu H. Yue
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Ultraviolet treatment apparatus
Patent number
8,242,460
Issue date
Aug 14, 2012
Tokyo Electron Limited
Hongyu Yue
B08 - CLEANING
Information
Patent Grant
Method for removing a pore-generating material from an uncured low-...
Patent number
7,977,256
Issue date
Jul 12, 2011
Tokyo Electron Limited
Junjun Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for curing a porous low dielectric constant dielectric film
Patent number
7,858,533
Issue date
Dec 28, 2010
Tokyo Electron Limited
Junjun Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of integrating an air gap structure with a substrate
Patent number
7,855,123
Issue date
Dec 21, 2010
Tokyo Electron Limited
Eric M. Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for air gap formation using UV-decomposable materials
Patent number
7,829,268
Issue date
Nov 9, 2010
Tokyo Electron Limited
Junjun Liu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and system for forming an air gap structure
Patent number
7,666,754
Issue date
Feb 23, 2010
Tokyo Electron Limited
Dorel I. Toma
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-step system and method for curing a dielectric film
Patent number
7,622,378
Issue date
Nov 24, 2009
Tokyo Electron Limited
Junjun Liu
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Patents Applications
last 30 patents
Information
Patent Application
FABRICATION METHODS FOR NANODELIVERY SYSTEMS FOR LONG TERM CONTROLL...
Publication number
20190038565
Publication date
Feb 7, 2019
Board of Regents, The University of Texas System
Paul S. HO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR COATING OR FILLING A POROUS MATERIAL
Publication number
20170037509
Publication date
Feb 9, 2017
TOKYO ELECTRON LIMITED
Jacques Faguet
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MULTI-STEP SYSTEM AND METHOD FOR CURING A DIELECTRIC FILM
Publication number
20160314966
Publication date
Oct 27, 2016
TOKYO ELECTRON LIMITED
Junjun LIU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-STEP SYSTEM AND METHOD FOR CURING A DIELECTRIC FILM
Publication number
20160027641
Publication date
Jan 28, 2016
TOKYO ELECTRON LIMITED
Junjun LIU
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
METHOD FOR REMOVING BACK-FILLED PORE-FILLING AGENT FROM A CURED POR...
Publication number
20150262865
Publication date
Sep 17, 2015
TOKYO ELECTRON LIMITED
Junjun Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and Hardware for Enhanced Removal of Post Etch Polymer and H...
Publication number
20150128991
Publication date
May 14, 2015
TOKYO ELECTRON LIMITED
Ian J. Brown
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-STEP SYSTEM AND METHOD FOR CURING A DIELECTRIC FILM
Publication number
20140109432
Publication date
Apr 24, 2014
TOKYO ELECTRON LIMITED
Junjun Liu
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
ANNEALING METHOD AND ANNEALING APPARATUS
Publication number
20120225568
Publication date
Sep 6, 2012
TOKYO ELECTRON LIMITED
Yusaku IZAWA
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Ultraviolet treatment apparatus
Publication number
20110233430
Publication date
Sep 29, 2011
TOKYO ELECTRON LIMITED
Hongyu YUE
B08 - CLEANING
Information
Patent Application
Method for cleaning low-k dielectrics
Publication number
20110232677
Publication date
Sep 29, 2011
TOKYO ELECTRON LIMITED
Junjun LIU
B08 - CLEANING
Information
Patent Application
Method for integrating low-k dielectrics
Publication number
20110237080
Publication date
Sep 29, 2011
TOKYO ELECTRON LIMITED
Junjun LIU
B08 - CLEANING
Information
Patent Application
Electrochemical substrate slicing using electromagnetic wave excita...
Publication number
20110186443
Publication date
Aug 4, 2011
TOKYO ELECTRON LIMITED
Hongyu H. YUE
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Method of integrating an air gap structure with a substrate
Publication number
20100248443
Publication date
Sep 30, 2010
TOKYO ELECTRON LIMITED
Eric M. Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DIELECTRIC TREATMENT PLATFORM FOR DIELECTRIC FILM DEPOSITION AND CU...
Publication number
20100068897
Publication date
Mar 18, 2010
TOKYO ELECTRON LIMITED
Junjun Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DIELECTRIC MATERIAL TREATMENT SYSTEM AND METHOD OF OPERATING
Publication number
20100065758
Publication date
Mar 18, 2010
TOKYO ELECTRON LIMITED
Junjun Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DIELECTRIC TREATMENT MODULE USING SCANNING IR RADIATION SOURCE
Publication number
20100065759
Publication date
Mar 18, 2010
TOKYO ELECTRON LIMITED
Junjun Liu
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
IR LASER OPTICS SYSTEM FOR DIELECTRIC TREATMENT MODULE
Publication number
20100067886
Publication date
Mar 18, 2010
TOKYO ELECTRON LIMITED
Junjun Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-STEP SYSTEM AND METHOD FOR CURING A DIELECTRIC FILM
Publication number
20100041248
Publication date
Feb 18, 2010
TOKYO ELECTRON LIMITED
Junjun LIU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR REMOVING A PORE-GENERATING MATERIAL FROM AN UNCURED LOW-...
Publication number
20090227118
Publication date
Sep 10, 2009
TOKYO ELECTRON LIMITED
Junjun Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR TREATING A DIELECTRIC FILM WITH INFRARED RADIATION
Publication number
20090226695
Publication date
Sep 10, 2009
TOKYO ELECTRON LIMITED
Junjun Liu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
POROUS SiCOH-CONTAINING DIELECTRIC FILM AND A METHOD OF PREPARING
Publication number
20090226694
Publication date
Sep 10, 2009
TOKYO ELECTRON LIMITED
Junjun Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR CURING A POROUS LOW DIELECTRIC CONSTANT DIELECTRIC FILM
Publication number
20090227119
Publication date
Sep 10, 2009
TOKYO ELECTRON LIMITED
Junjun Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and system for forming an air gap structure
Publication number
20090130863
Publication date
May 21, 2009
TOKYO ELECTRON LIMITED
Dorel I. TOMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for air gap formation using UV-decomposable materials
Publication number
20090104571
Publication date
Apr 23, 2009
TOKYO ELECTRON LIMITED
Junjun LIU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for curing a dielectric film
Publication number
20090075491
Publication date
Mar 19, 2009
TOKYO ELECTRON LIMITED
Junjun LIU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Thermal processing system for curing dielectric films
Publication number
20080063809
Publication date
Mar 13, 2008
TOKYO ELECTRON LIMITED
Eric M. Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Multi-step system and method for curing a dielectric film
Publication number
20070105401
Publication date
May 10, 2007
TOKYO ELECTRON LIMITED
Junjun Liu
H01 - BASIC ELECTRIC ELEMENTS