Junko Hatta

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Kawasaki, JP

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Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam exposure system and method of exposing a patt...
- Patent number 5,391,886
- Issue date Feb 21, 1995
- Fujitsu Limited
- Akio Yamada
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method for writing a pattern on an object by a focused electron bea...
- Patent number 5,194,741
- Issue date Mar 16, 1993
- Fujitsu Limited
- Kiichi Sakamoto
- B82 - NANO-TECHNOLOGY