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Evanston, IL, US
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Patents Grants
last 30 patents
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Patent Grant
Methods for forming self-aligned contacts using spin-on silicon car...
Patent number
12,080,599
Issue date
Sep 3, 2024
Tokyo Electron Limited
Junling Sun
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Forming contact holes with controlled local critical dimension unif...
Patent number
11,978,631
Issue date
May 7, 2024
Tokyo Electron Limited
Junling Sun
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods to control critical dimension (CD) shrink ratio...
Patent number
11,495,436
Issue date
Nov 8, 2022
Tokyo Electron Limited
Junling Sun
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for forming self-aligned contacts using spin-on silicon car...
Patent number
11,482,454
Issue date
Oct 25, 2022
Tokyo Electron Limited
Junling Sun
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method utilizing using post etch pattern encapsulation
Patent number
10,950,460
Issue date
Mar 16, 2021
Tokyo Electron Limited
Angelique Raley
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Rigid naphthalenediimide triangle structures
Patent number
10,903,496
Issue date
Jan 26, 2021
Northwestern University
Dongyang Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Mechanically interlocked air-stable radicals
Patent number
10,867,718
Issue date
Dec 15, 2020
Northwestern University
Zhichang Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Viologen-based rotaxanes
Patent number
10,259,913
Issue date
Apr 16, 2019
Northwestern University
James Fraser Stoddart
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Patents Applications
last 30 patents
Information
Patent Application
Methods for Forming Self-Aligned Contacts Using Spin-on Silicon Car...
Publication number
20230044047
Publication date
Feb 9, 2023
TOKYO ELECTRON LIMITED
Junling Sun
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Methods for Forming Self-Aligned Contacts Using Spin-on Silicon Car...
Publication number
20220262679
Publication date
Aug 18, 2022
TOKYO ELECTRON LIMITED
Junling Sun
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FORMING CONTACT HOLES WITH CONTROLLED LOCAL CRITICAL DIMENSION UNIF...
Publication number
20220181152
Publication date
Jun 9, 2022
TOKYO ELECTRON LIMITED
Junling Sun
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Systems and Methods to Control Critical Dimension (CD) Shrink Ratio...
Publication number
20210343502
Publication date
Nov 4, 2021
TOKYO ELECTRON LIMITED
Junling Sun
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method Utilizing Using Post Etch Pattern Encapsulation
Publication number
20200051832
Publication date
Feb 13, 2020
TOKYO ELECTRON LIMITED
Angelique Raley
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MECHANICALLY INTERLOCKED AIR-STABLE RADICALS
Publication number
20190016737
Publication date
Jan 17, 2019
Northwestern University
Zhichang Liu
C07 - ORGANIC CHEMISTRY
Information
Patent Application
VIOLOGEN-BASED ROTAXANES
Publication number
20170218135
Publication date
Aug 3, 2017
Northwestern University
James Fraser Stoddart
C07 - ORGANIC CHEMISTRY
Information
Patent Application
RIGID NAPHTHALENEDIIMIDE TRIANGLE STRUCTURES
Publication number
20160276669
Publication date
Sep 22, 2016
Northwestern University
Dongyang Chen
H01 - BASIC ELECTRIC ELEMENTS