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Junnosuke TAGUCHI
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Iwate, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Rotational drive device, substrate processing apparatus, and rotati...
Patent number
11,885,003
Issue date
Jan 30, 2024
Tokyo Electron Limited
Junnosuke Taguchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus and monitoring method
Patent number
11,765,879
Issue date
Sep 19, 2023
Tokyo Electron Limited
Junnosuke Taguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Magnetic coupling device
Patent number
11,670,999
Issue date
Jun 6, 2023
PROTERIAL, LTD.
Akihiro Kimoto
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Substrate warpage detection device, substrate warpage detection met...
Patent number
10,763,147
Issue date
Sep 1, 2020
Tokyo Electron Limited
Junnosuke Taguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate warping monitoring device and substrate processing appara...
Patent number
10,615,066
Issue date
Apr 7, 2020
Tokyo Electron Limited
Toshiya Chiba
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20240295027
Publication date
Sep 5, 2024
TOKYO ELECTRON LIMITED
Junnosuke TAGUCHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20240060181
Publication date
Feb 22, 2024
TOKYO ELECTRON LIMITED
Manabu HONMA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20230257877
Publication date
Aug 17, 2023
TOKYO ELECTRON LIMITED
Ibuki HAYASHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20230061423
Publication date
Mar 2, 2023
TOKYO ELECTRON LIMITED
Junnosuke TAGUCHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20230062671
Publication date
Mar 2, 2023
TOKYO ELECTRON LIMITED
Junnosuke TAGUCHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20220293439
Publication date
Sep 15, 2022
TOKYO ELECTRON LIMITED
Yuki WADA
F28 - HEAT EXCHANGE IN GENERAL
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20220130712
Publication date
Apr 28, 2022
TOKYO ELECTRON LIMITED
Junnosuke TAGUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MAGNETIC COUPLING DEVICE
Publication number
20220037977
Publication date
Feb 3, 2022
Hitachi Metals, Ltd.
Akihiro KIMOTO
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20210217651
Publication date
Jul 15, 2021
TOKYO ELECTRON LIMITED
Junnosuke TAGUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND ROTARY DRIVE METHOD
Publication number
20210214845
Publication date
Jul 15, 2021
TOKYO ELECTRON LIMITED
Junnosuke TAGUCHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ROTATIONAL DRIVE DEVICE, SUBSTRATE PROCESSING APPARATUS, AND ROTATI...
Publication number
20210180187
Publication date
Jun 17, 2021
TOKYO ELECTRON LIMITED
Junnosuke TAGUCHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND MONITORING METHOD
Publication number
20200365594
Publication date
Nov 19, 2020
TOKYO ELECTRON LIMITED
Junnosuke TAGUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate Warpage Detection Device, Substrate Warpage Detection Met...
Publication number
20190013225
Publication date
Jan 10, 2019
TOKYO ELECTRON LIMITED
Junnosuke TAGUCHI
G01 - MEASURING TESTING
Information
Patent Application
SUBSTRATE WARPING MONITORING DEVICE AND SUBSTRATE PROCESSING APPARA...
Publication number
20190013224
Publication date
Jan 10, 2019
TOKYO ELECTRON LIMITED
Toshiya CHIBA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...