Junwen Huang

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Shanghai, CN

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Patents Grantslast 30 patents

Information Patent Grant
Metal hardmask all in one integrated etch
- Patent number 9,349,606
- Issue date May 24, 2016
- Lam Research Corporation
- Yu Cheng
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METAL HARDMASK ALL IN ONE INTEGRATED ETCH
- Publication number 20150179472
- Publication date Jun 25, 2015
- LAM RESEARCH CORPORATION
- Yu Cheng
- H01 - BASIC ELECTRIC ELEMENTS