Junwon LEE

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Weston, CT, US

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus for and method of sensing alignment marks
- Patent number 11,899,380
- Issue date Feb 13, 2024
- ASML Holding N.V.
- Krishanu Shome
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS FOR AND METHOD OF SENSING ALIGNMENT MARKS
- Publication number 20220291598
- Publication date Sep 15, 2022
- ASML Holding N.V.
- Krishanu SHOME
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY