Junya HARA

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Yamanashi, JP

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Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR FORMING RUTHENIUM OXIDE FILM
- Publication number 20130115367
- Publication date May 9, 2013
- TOKYO ELECTRON LIMITED
- Naotaka NORO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...