Junya Hiraka

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Oshu-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Semiconductor processing system including vaporizer and method for...
- Patent number 9,159,548
- Issue date Oct 13, 2015
- Tokyo Electron Limited
- Tsuneyuki Okabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
CVD method for forming silicon nitride film
- Patent number 7,462,376
- Issue date Dec 9, 2008
- Tokyo Electron Limited
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR PROCESSING SYSTEM INCLUDING VAPORIZER AND METHOD FOR...
- Publication number 20140080320
- Publication date Mar 20, 2014
- TOKYO ELECTRON LIMITED
- Tsuneyuki Okabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor processing system including vaporizer and method for...
- Publication number 20090186479
- Publication date Jul 23, 2009
- TOKYO ELECTRON LIMITED
- Tsuneyuki Okabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...