Junya Miyahara

Person

Hyogo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Tungsten film forming method and storage medium
- Patent number 10,400,330
- Issue date Sep 3, 2019
- Tokyo Electron Limited
- Kenji Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing insulating film laminated structure
- Patent number 9,887,081
- Issue date Feb 6, 2018
- Tokyo Electron Limited
- Junya Miyahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Forming a silicon nitride film by plasma CVD
- Patent number 8,119,545
- Issue date Feb 21, 2012
- Tokyo Electron Limited
- Minoru Honda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
TUNGSTEN FILM FORMING METHOD AND STORAGE MEDIUM
- Publication number 20170283942
- Publication date Oct 5, 2017
- TOKYO ELECTRON LIMITED
- Kenji SUZUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF CONTROLLING THRESHOLD OF TRANSISTOR AND METHOD OF MANUFAC...
- Publication number 20170221716
- Publication date Aug 3, 2017
- Kentaro SHIRAGA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING INSULATING FILM LAMINATED STRUCTURE
- Publication number 20170170010
- Publication date Jun 15, 2017
- Junya MIYAHARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SILICON DIOXIDE FILM AND PROCESS FOR PRODUCTION THEREOF, COMPUTER-R...
- Publication number 20120126376
- Publication date May 24, 2012
- TOKYO ELECTRON LIMITED
- Minoru Honda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SILICON OXIDE FILM, METHOD FOR FORMING SILICON OXIDE FILM, AND PLAS...
- Publication number 20110206590
- Publication date Aug 25, 2011
- TOKYO ELECTRON LIMITED
- Minoru Honda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SILICON OXYNITRIDE FILM AND PROCESS FOR PRODUCTION THEREOF, COMPUTE...
- Publication number 20110189862
- Publication date Aug 4, 2011
- TOKYO ELECTRON LIMITED
- Minoru Honda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS FOR PRODUCING SILICON NITRIDE FILM, PROCESS FOR PRODUCING S...
- Publication number 20110086517
- Publication date Apr 14, 2011
- TOKYO ELECTRON LIMITED
- Minoru Honda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Junya Miyahara

Person

Patents Grantslast 30 patents

Tungsten film forming method and storage medium

Method for manufacturing insulating film laminated structure

Forming a silicon nitride film by plasma CVD

Patents Applicationslast 30 patents

TUNGSTEN FILM FORMING METHOD AND STORAGE MEDIUM

METHOD OF CONTROLLING THRESHOLD OF TRANSISTOR AND METHOD OF MANUFAC...

METHOD FOR MANUFACTURING INSULATING FILM LAMINATED STRUCTURE

SILICON DIOXIDE FILM AND PROCESS FOR PRODUCTION THEREOF, COMPUTER-R...

SILICON OXIDE FILM, METHOD FOR FORMING SILICON OXIDE FILM, AND PLAS...

SILICON OXYNITRIDE FILM AND PROCESS FOR PRODUCTION THEREOF, COMPUTE...

PROCESS FOR PRODUCING SILICON NITRIDE FILM, PROCESS FOR PRODUCING S...