Membership
Tour
Register
Log in
Junya Nakahira
Follow
Person
Tokyo, JP
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
In-situ cleaning of plasma treatment chamber
Patent number
5,620,526
Issue date
Apr 15, 1997
Fujitsu Limited
Hirofumi Watatani
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of depositing insulating layer on underlying layer using pla...
Patent number
5,231,057
Issue date
Jul 27, 1993
Fujitsu Limited
Masahiko Doki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...