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Junya Sato
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Hokkaido, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate state determining apparatus, substrate processing apparat...
Patent number
11,598,007
Issue date
Mar 7, 2023
Tokyo Electron Limited
Nao Akashi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Teaching method of transfer device
Patent number
10,840,122
Issue date
Nov 17, 2020
Tokyo Electron Limited
Toshiyuki Kobayashi
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information
Patent Grant
Substrate processing apparatus, substrate processing method and rec...
Patent number
9,824,861
Issue date
Nov 21, 2017
Tokyo Electron Limited
Masahiro Numakura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Thermal processing apparatus, thermal processing method, and storag...
Patent number
8,565,911
Issue date
Oct 22, 2013
Tokyo Electron Limited
Yo Abe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Thermal processing apparatus, thermal processing method, and storag...
Patent number
8,423,175
Issue date
Apr 16, 2013
Tokyo Electron Limited
Yo Abe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Image binarizing method, image processing device, and computer program
Patent number
8,345,951
Issue date
Jan 1, 2013
Tokyo Electron Limited
Junya Sato
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE STATE DETERMINING APPARATUS, SUBSTRATE PROCESSING APPARAT...
Publication number
20200080202
Publication date
Mar 12, 2020
TOKYO ELECTRON LIMITED
Nao Akashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
TEACHING METHOD OF TRANSFER DEVICE
Publication number
20190181031
Publication date
Jun 13, 2019
TOKYO ELECTRON LIMITED
Toshiyuki KOBAYASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...
Publication number
20160190024
Publication date
Jun 30, 2016
TOKYO ELECTRON LIMITED
Masahiro NUMAKURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
THERMAL PROCESSING APPARATUS, THERMAL PROCESSING METHOD, AND STORAG...
Publication number
20130204425
Publication date
Aug 8, 2013
TOKYO ELECTRON LIMITED
Yo ABE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
THERMAL PROCESSING APPARATUS, THERMAL PROCESSING METHOD, AND STORAG...
Publication number
20100057249
Publication date
Mar 4, 2010
TOKYO ELECTRON LIMITED
Yo ABE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Image Binarizing Method, Image Processing Device, and Computer Program
Publication number
20090208132
Publication date
Aug 20, 2009
TOKYO ELECTRON LIMITED
Junya Sato
G06 - COMPUTING CALCULATING COUNTING