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Junya WAKI
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Handa-City, JP
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last 30 patents
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Patent Grant
Heating device and semiconductor manufacturing apparatus
Patent number
9,123,757
Issue date
Sep 1, 2015
NGK Insulators, Ltd.
Yutaka Unno
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
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Patent Application
HEATING DEVICE AND SEMICONDUCTOR MANUFACTURING APPARATUS
Publication number
20130248509
Publication date
Sep 26, 2013
NGK Insulators, Ltd.
Yutaka UNNO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BODY HAVING A JUNCTION AND METHOD OF MANUFACTURING THE SAME
Publication number
20090169726
Publication date
Jul 2, 2009
NGK Insulators, Ltd.
Tomoyuki FUJII
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR