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Jurgen Drews
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Frankfurt, DE
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Patents Grants
last 30 patents
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Patent Grant
MEMS-microviscometer
Patent number
9,638,617
Issue date
May 2, 2017
IHP GmbH—Innovations for High Performance Microelectronics/Leibniz-Institut f...
Mario Birkholz
G01 - MEASURING TESTING
Information
Patent Grant
Corrosion-resistant MEMS component and method for the production th...
Patent number
8,330,237
Issue date
Dec 11, 2012
IHP GmbH - Innovations for High Performance Microelectronics
Jürgen Drews
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
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Patent Application
MEMS-Microviscometer
Publication number
20140000344
Publication date
Jan 2, 2014
Mario Birkholz
G01 - MEASURING TESTING
Information
Patent Application
CORROSION-RESISTANT MEMS COMPONENT AND METHOD FOR THE PRODUCTION TH...
Publication number
20100207216
Publication date
Aug 19, 2010
IHP GmbH - Innovations for High Performance Micro -electronics/Leibriz-Instit...
Jürgen Drews
B81 - MICRO-STRUCTURAL TECHNOLOGY