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Jurgen Faltus
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Aalen, DE
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Patents Grants
last 30 patents
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Patent Grant
Facet mirror having a number of mirror facets
Patent number
7,354,168
Issue date
Apr 8, 2008
Carl Zeiss SMT AG
Hubert Holderer
G02 - OPTICS
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last 30 patents
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Patent Application
Facet mirror having a number of mirror facets
Publication number
20050030653
Publication date
Feb 10, 2005
Hubert Holderer
G02 - OPTICS