Jurgen Frosien

Person

Berlin, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Simplified particle emitter and method of operating thereof
- Patent number 10,699,867
- Issue date Jun 30, 2020
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Stefan Lanio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and method for forming a plurality of charged particle beamlets
- Patent number 10,504,683
- Issue date Dec 10, 2019
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Jürgen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for inspecting a specimen and charged particle multi-beam de...
- Patent number 10,453,645
- Issue date Oct 22, 2019
- Applied Materials Israel Ltd.
- Jürgen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of reducing coma and chromatic aberration in a charged parti...
- Patent number 10,297,418
- Issue date May 21, 2019
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Jürgen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-beam lens device, charged particle beam device, and method of...
- Patent number 9,984,848
- Issue date May 29, 2018
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Jürgen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for inspecting a specimen and charged particle multi-beam de...
- Patent number 9,922,796
- Issue date Mar 20, 2018
- Applied Materials Israel Ltd.
- Jürgen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System for imaging a signal charged particle beam, method for imagi...
- Patent number 9,666,405
- Issue date May 30, 2017
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Stefan Lanio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle source arrangement for a charged particle beam dev...
- Patent number 9,666,404
- Issue date May 30, 2017
- ICT Integrated Circuit Testing Gesellschaft für Halbleiteprüftechnik mbH
- Jürgen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device and method for inspecting and/or imagi...
- Patent number 9,601,303
- Issue date Mar 21, 2017
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Jürgen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High resolution charged particle beam device and method of operatin...
- Patent number 9,595,417
- Issue date Mar 14, 2017
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Jürgen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for detecting signal charged particles in a charged particle...
- Patent number 9,589,763
- Issue date Mar 7, 2017
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Jürgen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam separator device, charged particle beam device and methods of...
- Patent number 9,472,373
- Issue date Oct 18, 2016
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Stefan Lanio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dome detection for charged particle beam device
- Patent number 9,330,884
- Issue date May 3, 2016
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Jürgen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam system and method of operating thereof
- Patent number 9,305,740
- Issue date Apr 5, 2016
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Jürgen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam specimen inspection system and method for ope...
- Patent number 9,245,709
- Issue date Jan 26, 2016
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Jürgen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for operating a charged particle beam device with adjustable...
- Patent number 9,202,666
- Issue date Dec 1, 2015
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Jürgen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-beam system for high throughput EBI
- Patent number 9,035,249
- Issue date May 19, 2015
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Jürgen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High brightness electron gun with moving condenser lens
- Patent number 8,921,804
- Issue date Dec 30, 2014
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbH
- Jürgen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam device with tilting and dispersion compensation, and...
- Patent number 8,866,102
- Issue date Oct 21, 2014
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Jürgen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam wafer inspection system and method of operation thereof
- Patent number 8,785,879
- Issue date Jul 22, 2014
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Jürgen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Twin beam charged particle column and method of operating thereof
- Patent number 8,378,299
- Issue date Feb 19, 2013
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Jürgen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and method for selecting an emission area of an emission pat...
- Patent number 7,847,266
- Issue date Dec 7, 2010
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Fang Zhou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device with aperture
- Patent number 7,763,866
- Issue date Jul 27, 2010
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Jürgen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Double stage charged particle beam energy width reduction system fo...
- Patent number 7,679,054
- Issue date Mar 16, 2010
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Jürgen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Imaging system with multi source array
- Patent number 7,638,777
- Issue date Dec 29, 2009
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Hans-Peter Feuerbaum
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Arrangement and method for compensating emitter tip vibrations
- Patent number 7,633,074
- Issue date Dec 15, 2009
- ICT, Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Jürgen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam emitting device and method for operating a ch...
- Patent number 7,595,490
- Issue date Sep 29, 2009
- ICT, Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Fang Zhou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam energy width reduction system for charged par...
- Patent number 7,507,956
- Issue date Mar 24, 2009
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Jürgen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Single stage charged particle beam energy width reduction system fo...
- Patent number 7,468,517
- Issue date Dec 23, 2008
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiternruftechnik mbH
- Jürgen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Focusing lens and charged particle beam device for titled landing a...
- Patent number 7,326,927
- Issue date Feb 5, 2008
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Jürgen Frosien
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR INSPECTING A SPECIMEN AND CHARGED PARTICLE BEAM DEVICE
- Publication number 20220392735
- Publication date Dec 8, 2022
- Pieter Kruit
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE AND METHOD FOR FORMING A PLURALITY OF CHARGED PARTICLE BEAMLETS
- Publication number 20190259563
- Publication date Aug 22, 2019
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Jürgen FROSIEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE, APERTURE ARRANGEMENT FOR A CHARGED PA...
- Publication number 20190066972
- Publication date Feb 28, 2019
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Jürgen Frosien
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SIMPLIFIED PARTICLE EMITTER AND METHOD OF OPERATING THEREOF
- Publication number 20180254165
- Publication date Sep 6, 2018
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Stefan LANIO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR INSPECTING A SPECIMEN AND CHARGED PARTICLE MULTI-BEAM DE...
- Publication number 20180158642
- Publication date Jun 7, 2018
- APPLIED MATERIALS ISRAEL LTD.
- Jürgen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM LENS DEVICE, CHARGED PARTICLE BEAM DEVICE, AND METHOD OF...
- Publication number 20170263413
- Publication date Sep 14, 2017
- Jurgen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE AND METHOD FOR INSPECTING AND/OR IMAGI...
- Publication number 20170047192
- Publication date Feb 16, 2017
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Jürgen FROSIEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF REDUCING COMA AND CHROMATIC ABBERATION IN A CHARGED PARTI...
- Publication number 20170018402
- Publication date Jan 19, 2017
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Jürgen FROSIEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE SOURCE ARRANGEMENT FOR A CHARGED PARTICLE BEAM DEV...
- Publication number 20160240345
- Publication date Aug 18, 2016
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Jürgen FROSIEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING CHARGED PARTICLE BEAM DEVICE HAVING AN ABERRATION CORRECTI...
- Publication number 20160189916
- Publication date Jun 30, 2016
- APPLIED MATERIALS ISRAEL LTD.
- Jürgen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH RESOLUTION CHARGED PARTICLE BEAM DEVICE AND METHOD OF OPERATIN...
- Publication number 20160181057
- Publication date Jun 23, 2016
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Jürgen FROSIEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DOME DETECTION FOR CHARGED PARTICLE BEAM DEVICE
- Publication number 20160133435
- Publication date May 12, 2016
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Jürgen FROSIEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SECONDARY ELECTRON OPTICS AND DETECTION DEVICE
- Publication number 20150228452
- Publication date Aug 13, 2015
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbH
- Stefan LANIO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM SYSTEM FOR HIGH THROUGHPUT EBI
- Publication number 20150155134
- Publication date Jun 4, 2015
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbH
- Jürgen FROSIEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM SYSTEM AND METHOD OF OPERATING THEREOF
- Publication number 20140367586
- Publication date Dec 18, 2014
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Jürgen FROSIEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH BRIGHTNESS ELECTRON GUN WITH MOVING CONDENSER LENS
- Publication number 20130327951
- Publication date Dec 12, 2013
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbH
- Jürgen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SIMPLIFIED PARTICLE EMITTER AND METHOD OF OPERATING THEREOF
- Publication number 20120091359
- Publication date Apr 19, 2012
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Stefan LANIO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM DEVICE WITH TILTING AND DISPERSION COMPENSATION, AND...
- Publication number 20120006997
- Publication date Jan 12, 2012
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbH
- Jürgen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TWIN BEAM CHARGED PARTICLE COLUMN AND METHOD OF OPERATING THEREOF
- Publication number 20110220795
- Publication date Sep 15, 2011
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Jürgen FROSIEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE, METHOD OF OPERATING A CHARGED PARTICL...
- Publication number 20110139978
- Publication date Jun 16, 2011
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Jürgen FROSIEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH THROUGHPUT SEM TOOL
- Publication number 20100320382
- Publication date Dec 23, 2010
- APPLIED MATERIALS ISRAEL, LTD.
- Gilad Almogy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ENERGY FILTER FOR COLD FIELD EMISSION ELECTRON BEAM APPARATUS
- Publication number 20090101819
- Publication date Apr 23, 2009
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- FANG ZHOU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM APPARATUS AND METHOD FOR ALIGNING SAME
- Publication number 20080073583
- Publication date Mar 27, 2008
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Thomas JASINSKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device with Aperture
- Publication number 20070257207
- Publication date Nov 8, 2007
- Jurgen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Double Stage Charged Particle Beam Energy Width Reduction System Fo...
- Publication number 20070200069
- Publication date Aug 30, 2007
- Jürgen Frosien
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED PARTICLE BEAM EMITTING DEVICE AND METHOD FOR OPERATING A CH...
- Publication number 20070158588
- Publication date Jul 12, 2007
- Fang Zhou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Single stage charged particle beam energy width reduction system fo...
- Publication number 20070158561
- Publication date Jul 12, 2007
- Jurgen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE AND METHOD FOR SELECTING AN EMISSION AREA OF AN EMISSION PAT...
- Publication number 20070085018
- Publication date Apr 19, 2007
- Fang Zhou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Arrangement and method for compensating emitter tip vibrations
- Publication number 20070085035
- Publication date Apr 19, 2007
- Jurgen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged particle beam energy width reduction system for charged par...
- Publication number 20070069150
- Publication date Mar 29, 2007
- Jürgen Frosien
- H01 - BASIC ELECTRIC ELEMENTS

Jurgen Frosien

Person

Patents Grantslast 30 patents

Simplified particle emitter and method of operating thereof

Device and method for forming a plurality of charged particle beamlets

Method for inspecting a specimen and charged particle multi-beam de...

Method of reducing coma and chromatic aberration in a charged parti...

Multi-beam lens device, charged particle beam device, and method of...

Method for inspecting a specimen and charged particle multi-beam de...

System for imaging a signal charged particle beam, method for imagi...

Charged particle source arrangement for a charged particle beam dev...

Charged particle beam device and method for inspecting and/or imagi...

High resolution charged particle beam device and method of operatin...

Method for detecting signal charged particles in a charged particle...

Beam separator device, charged particle beam device and methods of...

Dome detection for charged particle beam device

Charged particle beam system and method of operating thereof

Charged particle beam specimen inspection system and method for ope...

Method for operating a charged particle beam device with adjustable...

Multi-beam system for high throughput EBI

High brightness electron gun with moving condenser lens

Electron beam device with tilting and dispersion compensation, and...

Electron beam wafer inspection system and method of operation thereof

Twin beam charged particle column and method of operating thereof

Device and method for selecting an emission area of an emission pat...

Charged particle beam device with aperture

Double stage charged particle beam energy width reduction system fo...

Imaging system with multi source array

Arrangement and method for compensating emitter tip vibrations

Charged particle beam emitting device and method for operating a ch...

Charged particle beam energy width reduction system for charged par...

Single stage charged particle beam energy width reduction system fo...

Focusing lens and charged particle beam device for titled landing a...

Patents Applicationslast 30 patents

METHOD FOR INSPECTING A SPECIMEN AND CHARGED PARTICLE BEAM DEVICE

DEVICE AND METHOD FOR FORMING A PLURALITY OF CHARGED PARTICLE BEAMLETS

CHARGED PARTICLE BEAM DEVICE, APERTURE ARRANGEMENT FOR A CHARGED PA...

SIMPLIFIED PARTICLE EMITTER AND METHOD OF OPERATING THEREOF

METHOD FOR INSPECTING A SPECIMEN AND CHARGED PARTICLE MULTI-BEAM DE...

MULTI-BEAM LENS DEVICE, CHARGED PARTICLE BEAM DEVICE, AND METHOD OF...

CHARGED PARTICLE BEAM DEVICE AND METHOD FOR INSPECTING AND/OR IMAGI...

METHOD OF REDUCING COMA AND CHROMATIC ABBERATION IN A CHARGED PARTI...

CHARGED PARTICLE SOURCE ARRANGEMENT FOR A CHARGED PARTICLE BEAM DEV...

SCANNING CHARGED PARTICLE BEAM DEVICE HAVING AN ABERRATION CORRECTI...

HIGH RESOLUTION CHARGED PARTICLE BEAM DEVICE AND METHOD OF OPERATIN...

DOME DETECTION FOR CHARGED PARTICLE BEAM DEVICE

SECONDARY ELECTRON OPTICS AND DETECTION DEVICE

MULTI-BEAM SYSTEM FOR HIGH THROUGHPUT EBI

CHARGED PARTICLE BEAM SYSTEM AND METHOD OF OPERATING THEREOF

HIGH BRIGHTNESS ELECTRON GUN WITH MOVING CONDENSER LENS

SIMPLIFIED PARTICLE EMITTER AND METHOD OF OPERATING THEREOF

ELECTRON BEAM DEVICE WITH TILTING AND DISPERSION COMPENSATION, AND...

TWIN BEAM CHARGED PARTICLE COLUMN AND METHOD OF OPERATING THEREOF

CHARGED PARTICLE BEAM DEVICE, METHOD OF OPERATING A CHARGED PARTICL...

HIGH THROUGHPUT SEM TOOL

ENERGY FILTER FOR COLD FIELD EMISSION ELECTRON BEAM APPARATUS

ION BEAM APPARATUS AND METHOD FOR ALIGNING SAME

Charged Particle Beam Device with Aperture

Double Stage Charged Particle Beam Energy Width Reduction System Fo...

CHARGED PARTICLE BEAM EMITTING DEVICE AND METHOD FOR OPERATING A CH...

Single stage charged particle beam energy width reduction system fo...

DEVICE AND METHOD FOR SELECTING AN EMISSION AREA OF AN EMISSION PAT...

Arrangement and method for compensating emitter tip vibrations

Charged particle beam energy width reduction system for charged par...