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Jurgen Grunwald
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Welzheim, DE
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Patents Grants
last 30 patents
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Patent Grant
Reticle-masking objective with aspherical lenses
Patent number
7,372,634
Issue date
May 13, 2008
Carl Zeiss SMT AG
Johannes Wangler
G02 - OPTICS
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Patent Grant
Reticle-masking objective with aspherical lenses
Patent number
7,130,129
Issue date
Oct 31, 2006
Carl Zeiss SMT AG
Jorg Schultz
G02 - OPTICS
Patents Applications
last 30 patents
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Patent Application
RETICLE-MASKING OBJECTIVE WITH ASPHERICAL LENSES
Publication number
20070014028
Publication date
Jan 18, 2007
Carl Zeiss SMT AG
Johannes Wangler
G02 - OPTICS
Information
Patent Application
Reticle-masking objective with aspherical lenses
Publication number
20040207928
Publication date
Oct 21, 2004
Jorg Schultz
G02 - OPTICS