Jurgen Hartmaier

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Oberkochen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Projection lens and microlithographic projection exposure apparatus
- Patent number 7,170,585
- Issue date Jan 30, 2007
- Carl Zeiss SMT AG
- Martin Brunotte
- G02 - OPTICS
Information Patent Grant
Projection lens and microlithographic projection exposure apparatus
- Patent number 6,879,379
- Issue date Apr 12, 2005
- Carl Zeiss SMT AG
- Martin Brunotte
- G02 - OPTICS
Information Patent Grant
Holding device for an optical element made of a crystalline material
- Patent number 6,667,839
- Issue date Dec 23, 2003
- Carl Zeiss SMT AG
- Jürgen Hartmaier
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Projection lens and microlithographic projection exposure apparatus
- Publication number 20050264786
- Publication date Dec 1, 2005
- Martin Brunotte
- G02 - OPTICS
Information Patent Application
PROJECTION LENS AND MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
- Publication number 20050134967
- Publication date Jun 23, 2005
- Carl Zeiss SMT AG
- Martin Brunotte
- G02 - OPTICS
Information Patent Application
Projection lens and microlithographic projection exposure apparatus
- Publication number 20040150806
- Publication date Aug 5, 2004
- Martin Brunotte
- G02 - OPTICS
Information Patent Application
Holding device for an optical element made of a crystalline material
- Publication number 20020108928
- Publication date Aug 15, 2002
- Carl Zeiss Semiconductor Manufacturing Technologies, AG
- Jurgen Hartmaier
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...