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Jurgen Kempf
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Schoenaich, DE
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last 30 patents
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Patent Grant
Mask for ion, electron or X-ray lithography and method of making it
Patent number
4,855,197
Issue date
Aug 8, 1989
International Business Machines Corporation
Werner Zapka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Magnetic head slider of ceramic material
Patent number
4,549,238
Issue date
Oct 22, 1985
International Business Machines Corporation
Friedrich Ertingshausen
G11 - INFORMATION STORAGE
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Patent Grant
Reactor for reactive ion etching and etching method
Patent number
4,424,102
Issue date
Jan 3, 1984
International Business Machines Corporation
Christine Brandeis
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Method of making semiconductor device structures by means of ion im...
Patent number
4,386,968
Issue date
Jun 7, 1983
International Business Machines Corporation
Holger Hinkel
H01 - BASIC ELECTRIC ELEMENTS