Jurgen Parzefall

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Villach, AT

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Patents Grantslast 30 patents

Information Patent Grant
Device and process for wet treating a peripheral area of a wafer-sh...
- Patent number 8,801,865
- Issue date Aug 12, 2014
- Lam Research AG
- Dieter Frank
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
DEVICE AND PROCESS FOR WET TREATING A PERIPHERAL AREA OF A WAFER-SH...
- Publication number 20100288312
- Publication date Nov 18, 2010
- LAM RESEARCH AG
- Dieter Frank
- H01 - BASIC ELECTRIC ELEMENTS