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Jurgen Schweckendiek
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Berlin, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Device for accomodating substrates
Patent number
7,270,240
Issue date
Sep 18, 2007
RENA Sondermaschinen GmbH
Matthias Niese
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and system for cleaning semiconductor elements
Patent number
7,067,017
Issue date
Jun 27, 2006
MKS Instruments, Inc.
Christiane Gottschalk
B08 - CLEANING
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Patent Grant
Method and system for cleaning semiconductor elements
Patent number
6,786,976
Issue date
Sep 7, 2004
Applied Science and Technology, Inc.
Christiane Gottschalk
B08 - CLEANING
Information
Patent Grant
Ozone generating apparatus
Patent number
5,569,437
Issue date
Oct 29, 1996
Sorbios Verfahrenstechnische Gerate und Systeme GmbH
Hans-Henrich Stiehl
C01 - INORGANIC CHEMISTRY
Information
Patent Grant
Apparatus for producing ozone from oxygen
Patent number
5,364,600
Issue date
Nov 15, 1994
Sorbios GmbH
Hans-H. Stiehl
C01 - INORGANIC CHEMISTRY
Patents Applications
last 30 patents
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Patent Application
METHOD FOR ETCHING OF SILICON SURFACES
Publication number
20120208370
Publication date
Aug 16, 2012
Rena GmbH
Ahmed Abdelbar El Jaouhari
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Application
Method and system for producing ozonized deionized water
Publication number
20070034230
Publication date
Feb 15, 2007
MKS Instruments, Inc.
Christiane Gottschalk
B08 - CLEANING
Information
Patent Application
Method and system for cleaning semiconductor elements
Publication number
20050056301
Publication date
Mar 17, 2005
Applied Science & Technology, Inc.
Christiane Gottschalk
B08 - CLEANING
Information
Patent Application
Device for accomodating substrates
Publication number
20040262245
Publication date
Dec 30, 2004
Matthias Niese
H01 - BASIC ELECTRIC ELEMENTS