Justin Jia-Jen Hwu

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Dual function array feature for CMP process control and inspection
- Patent number 6,929,961
- Issue date Aug 16, 2005
- Hitachi Global Storage Technologies Netherlands B.V.
- Justin Jia-Jen Hwu
- H01 - BASIC ELECTRIC ELEMENTS