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last 30 patents
Information
Patent Grant
Heat dissipation for semiconductor devices and methods of manufacture
Patent number
11,990,404
Issue date
May 21, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Chen-Fong Tsai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser de-bonding carriers and composite carriers thereof
Patent number
11,908,708
Issue date
Feb 20, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Huicheng Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and manufacturing method thereof
Patent number
11,894,438
Issue date
Feb 6, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Yee-Chia Yeo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion implantation with annealing for substrate cutting
Patent number
11,855,040
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Huicheng Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Forming STI regions to separate semiconductor Fins
Patent number
11,450,661
Issue date
Sep 20, 2022
Taiwan Semiconductor Manufacturing Company, Ltd.
Chih-Yu Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and manufacturing method thereof
Patent number
11,043,570
Issue date
Jun 22, 2021
Taiwan Semiconductor Manufacturing Co., Ltd
Yee-Chia Yeo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wrap-around contact plug and method manufacturing same
Patent number
10,879,075
Issue date
Dec 29, 2020
Taiwan Semiconductor Manufacturing Company, Ltd
Sung-Li Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device having a uniform and thin silicide layer on an...
Patent number
10,811,262
Issue date
Oct 20, 2020
Taiwan Semiconductor Manufacturing Co., Ltd
Kai-Hsuan Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Formation method of interconnection structure of semiconductor device
Patent number
10,658,234
Issue date
May 19, 2020
Taiwan Semiconductor Manufacturing Co., Ltd
Min-Hsiu Hung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wrap-around contact plug and method manufacturing same
Patent number
10,636,664
Issue date
Apr 28, 2020
Taiwan Semiconductor Manufacturing Company, Ltd
Sung-Li Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and manufacturing method thereof
Patent number
10,593,775
Issue date
Mar 17, 2020
Taiwan Semiconductor Manufacturing Co., Ltd
Yee-Chia Yeo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and manufacturing method thereof
Patent number
10,546,938
Issue date
Jan 28, 2020
Taiwan Semiconductor Manufacturing Co., Ltd
Yee-Chia Yeo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wrap-around contact plug and method manufacturing same
Patent number
10,475,654
Issue date
Nov 12, 2019
Taiwan Semiconductor Manufacturing Company, Ltd
Sung-Li Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wrap-around contact plug and method manufacturing same
Patent number
10,468,260
Issue date
Nov 5, 2019
Taiwan Semiconductor Manufacturing Company, Ltd
Sung-Li Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor Fin FET device with epitaxial source/drain
Patent number
10,312,369
Issue date
Jun 4, 2019
Taiwan Semiconductor Manufacturing Co., Ltd
Hung-Li Chiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and manufacturing method thereof
Patent number
10,164,042
Issue date
Dec 25, 2018
Taiwan Semiconductor Manufacturing Co., Ltd
Yee-Chia Yeo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for forming STI regions in integrated circuits
Patent number
9,953,975
Issue date
Apr 24, 2018
Taiwan Semiconductor Manufacturing Company, Ltd.
Chih-Yu Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Metal liner overhang reduction and manufacturing method thereof
Patent number
9,899,258
Issue date
Feb 20, 2018
Taiwan Semiconductor Manufacturing Company, Ltd.
Pei-Wen Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor Fin FET device with epitaxial source/drain
Patent number
9,859,427
Issue date
Jan 2, 2018
Tawain Semiconductor Manufacturing Co., Ltd.
Hung-Li Chiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Temperature controlled loadlock chamber
Patent number
9,698,030
Issue date
Jul 4, 2017
Taiwan Semiconductor Manufacturing Company, Ltd.
Chun-Hsien Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor Fin FET device with epitaxial source/drain
Patent number
9,472,669
Issue date
Oct 18, 2016
Taiwan Semiconductor Manufacturing Co., Ltd
Hung-Li Chiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Temperature controlled loadlock chamber
Patent number
8,905,124
Issue date
Dec 9, 2014
Taiwan Semiconductor Manufacturing Company, Ltd.
Chun-Hsien Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Heat spreader structures in scribe lines
Patent number
8,860,208
Issue date
Oct 14, 2014
Taiwan Semiconductor Manufacturing Company, Ltd.
Hsien-Wei Chen
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Self-aligned halo/pocket implantation for reducing leakage and sour...
Patent number
8,822,293
Issue date
Sep 2, 2014
Taiwan Semiconductor Manufacturing Company, Ltd.
Chen-Hua Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
PVD target with end of service life detection capability
Patent number
8,795,486
Issue date
Aug 5, 2014
Taiwan Semiconductor Manufacturing Company, Ltd.
Yi-Li Hsiao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatuses and methods for maskless mesoscale material deposition
Patent number
8,455,051
Issue date
Jun 4, 2013
Optomec, Inc.
Michael J. Renn
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Laser processing for heat-sensitive mesoscale deposition of oxygen-...
Patent number
8,110,247
Issue date
Feb 7, 2012
Optomec Design Company
Michael J. Renn
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Apparatuses and methods for maskless mesoscale material deposition
Patent number
7,987,813
Issue date
Aug 2, 2011
Optomec, Inc.
Michael J. Renn
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Annular aerosol jet deposition using an extended nozzle
Patent number
7,938,079
Issue date
May 10, 2011
Optomec Design Company
Bruce H. King
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Heat spreader structures in scribe lines
Patent number
7,906,836
Issue date
Mar 15, 2011
Taiwan Semiconductor Manufacturing Company, Ltd.
Hsien-Wei Chen
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
HEAT DISSIPATION FOR SEMICONDUCTOR DEVICES AND METHODS OF MANUFACTURE
Publication number
20240266285
Publication date
Aug 8, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Chen-Fong Tsai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LASER DE-BONDING CARRIERS AND COMPOSITE CARRIERS THEREOF
Publication number
20240153786
Publication date
May 9, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Huicheng Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
Publication number
20240145569
Publication date
May 2, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Yee-Chia YEO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION IMPLANTATION WITH ANNEALING FOR SUBSTRATE CUTTING
Publication number
20240120314
Publication date
Apr 11, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Huicheng Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor Device, Method of Manufacture, and System of Manufacture
Publication number
20230063975
Publication date
Mar 2, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Yun Chen Teng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER BONDING SYSTEM AND METHOD OF USING THE SAME
Publication number
20230067346
Publication date
Mar 2, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Han-De Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Dynamic Bonding Gap Control and Tool for Wafer Bonding
Publication number
20230019415
Publication date
Jan 19, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Han-De Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Wafer Bonding Apparatus and Method
Publication number
20230010038
Publication date
Jan 12, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Cheng-I Chu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Laser De-Bonding Carriers and Composite Carriers Thereof
Publication number
20220406621
Publication date
Dec 22, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Huicheng Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Ion Implantation with Annealing for Substrate Cutting
Publication number
20220367410
Publication date
Nov 17, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Huicheng Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BONDING SYSTEM AND METHOD FOR USING THE SAME
Publication number
20220367249
Publication date
Nov 17, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Chieh Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEM FOR BONDING
Publication number
20220367215
Publication date
Nov 17, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Chieh Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Heat Dissipation for Semiconductor Devices and Methods of Manufacture
Publication number
20220359369
Publication date
Nov 10, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Chen-Fong Tsai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BONDING SYSTEM AND METHOD FOR USING THE SAME
Publication number
20220344197
Publication date
Oct 27, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Chieh Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METAL ADHESION LAYER TO PROMOTE METAL PLUG ADHESION
Publication number
20220084879
Publication date
Mar 17, 2022
Taiwan Semiconductor Manufacturing Company Limited
Pei-Wen WU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
Publication number
20210313438
Publication date
Oct 7, 2021
Taiwan Semiconductor Manufacturing Company, Ltd.
Yee-Chia YEO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE HAVING A UNIFORM AND THIN SILICIDE LAYER ON AN...
Publication number
20210035806
Publication date
Feb 4, 2021
Taiwan Semiconductor Manufacturing Co., Ltd.
Kai-Hsuan LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Wrap-Around Contact Plug and Method Manufacturing Same
Publication number
20200258746
Publication date
Aug 13, 2020
Taiwan Semiconductor Manufacturing Company, Ltd.
Sung-Li Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
Publication number
20200212191
Publication date
Jul 2, 2020
Taiwan Semiconductor Manufacturing Co., Ltd.
Yee-Chia YEO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Wrap-Around Contact Plug and Method Manufacturing Same
Publication number
20200043738
Publication date
Feb 6, 2020
Taiwan Semiconductor Manufacturing Company, Ltd.
Sung-Li Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
Publication number
20190123161
Publication date
Apr 25, 2019
Taiwan Semiconductor Manufacturing Co., Ltd.
Yee-Chia YEO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Wrap-Around Contact Plug and Method Manufacturing Same
Publication number
20190109006
Publication date
Apr 11, 2019
Taiwan Semiconductor Manufacturing Company, Ltd.
Sung-Li Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Wrap-Around Contact Plug and Method Manufacturing Same
Publication number
20190067013
Publication date
Feb 28, 2019
Taiwan Semiconductor Manufacturing Company, Ltd.
Sung-Li Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Methods for Forming STI Regions in Integrated Circuits
Publication number
20180247935
Publication date
Aug 30, 2018
Taiwan Semiconductor Manufacturing Company, Ltd.
Chih-Yu Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
Publication number
20180151683
Publication date
May 31, 2018
Taiwan Semiconductor Manufacturing Co., Ltd.
Yee-Chia YEO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR FIN FET DEVICE WITH EPITAXIAL SOURCE/DRAIN
Publication number
20180102436
Publication date
Apr 12, 2018
Taiwan Semiconductor Manufacturing Co., Ltd.
Hung-Li CHIANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STRUCTURE AND FORMATION METHOD OF INTERCONNECTION STRUCTURE OF SEMI...
Publication number
20180033687
Publication date
Feb 1, 2018
Taiwan Semiconductor Manufacturing Co., Ltd.
Min-Hsiu HUNG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
Publication number
20170207095
Publication date
Jul 20, 2017
Taiwan Semiconductor Manufacturing Co., Ltd.
Kai-Hsuan LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR FIN FET DEVICE WITH EPITAXIAL SOURCE/DRAIN
Publication number
20170069756
Publication date
Mar 9, 2017
Taiwan Semiconductor Manufacturing Co., Ltd.
Hung-Li CHIANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Temperature Controlled Loadlock Chamber
Publication number
20150132100
Publication date
May 14, 2015
Taiwan Semiconductor Manufacturing Company, Ltd.
Chun-Hsien Lin
H01 - BASIC ELECTRIC ELEMENTS