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Jyoji Heianna
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Tokyo, JP
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Patents Grants
last 30 patents
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Patent Grant
Polishing apparatus and polishing method
Patent number
8,360,817
Issue date
Jan 29, 2013
Ebara Corporation
Yu Ishii
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
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Patent Application
SUBSTRATE TREATMENT APPARATUS AND METHOD FOR TREATING SUBSTRATE
Publication number
20240286245
Publication date
Aug 29, 2024
EBARA CORPORATION
Shinji KAJITA
B08 - CLEANING
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Patent Application
POLISHING APPARATUS AND POLISHING METHOD
Publication number
20100255756
Publication date
Oct 7, 2010
Yu ISHII
B24 - GRINDING POLISHING