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Singapore, SG
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Patents Grants
last 30 patents
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Patent Grant
Formation of metal silicide layer over copper interconnect for reli...
Patent number
7,790,617
Issue date
Sep 7, 2010
Chartered Semiconductor Manufacturing, Ltd.
Yeow Kheng Lim
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Formation of metal silicide layer over copper interconnect for reli...
Publication number
20070111522
Publication date
May 17, 2007
Chartered Semiconductor Manufacturing Ltd.
Yeow Kheng Lim
H01 - BASIC ELECTRIC ELEMENTS