Jyunichi Nishihara

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Osaka, JP

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Patents Grantslast 30 patents

Information Patent Grant
Heating apparatus, substrate processing apparatus employing the sam...
- Patent number 9,184,069
- Issue date Nov 10, 2015
- Hitachi Kokusai Electric Inc.
- Akira Hayashida
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Heating apparatus, substrate processing apparatus employing the sam...
- Patent number 8,158,911
- Issue date Apr 17, 2012
- Hitachi Kokusai Electric Inc.
- Akira Hayashida
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Heating apparatus, substrate processing apparatus, and method of ma...
- Patent number 8,116,618
- Issue date Feb 14, 2012
- Hitachi Kokusai Electric Inc.
- Akira Hayashida
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Heating apparatus, substrate processing apparatus employing the sam...
- Publication number 20090014428
- Publication date Jan 15, 2009
- Hitachi Kokusai Electric Inc.
- Akira Hayashida
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Heating apparatus, substrate processing apparatus employing the sam...
- Publication number 20090014435
- Publication date Jan 15, 2009
- Hitachi Kokusai Electric Inc.
- Akira Hayashida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Heating apparatus, substrate processing apparatus, and method of ma...
- Publication number 20090016706
- Publication date Jan 15, 2009
- Hitachi Kokusai Electric Inc.
- Akira Hayashida
- H01 - BASIC ELECTRIC ELEMENTS