Jyunichi Tanaka

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 6,422,172
- Issue date Jul 23, 2002
- Hitachi, Ltd.
- Jyunichi Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Plasma processing apparatus and plasma processing method
- Publication number 20030010453
- Publication date Jan 16, 2003
- Jyunichi Tanaka
- H01 - BASIC ELECTRIC ELEMENTS