Jyunji ARIGA

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Nirasaki City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Cleaning method of substrate processing apparatus and substrate pro...
- Patent number 11,260,433
- Issue date Mar 1, 2022
- Tokyo Electron Limited
- Yoshihiro Takezawa
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
Cleaning Method of Substrate Processing Apparatus and Substrate Pro...
- Publication number 20200230666
- Publication date Jul 23, 2020
- TOKYO ELECTRON LIMITED
- Yoshihiro TAKEZAWA
- B08 - CLEANING
Information Patent Application
SILICON FILM FORMATION METHOD AND SILICON FILM FORMATION APPARATUS
- Publication number 20110287629
- Publication date Nov 24, 2011
- TOKYO ELECTRON LIMITED
- Akinobu KAKIMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...