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K. Chris Haugan
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Kalispell, MT, US
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last 30 patents
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Patent Grant
Cathode current control system for a wafer electroplating apparatus
Patent number
6,139,703
Issue date
Oct 31, 2000
Semitool, Inc.
Kyle M. Hanson
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
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Patent Grant
Cathode current control system for a wafer electroplating apparatus
Patent number
6,004,440
Issue date
Dec 21, 1999
Semitool, Inc.
Kyle M. Hanson
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR