Kadthala Ramaya NARENDRNATH

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Carrier head membrane with regions of different roughness
- Patent number 12,172,264
- Issue date Dec 24, 2024
- Applied Materials, Inc.
- Young J. Paik
- B24 - GRINDING POLISHING
Information Patent Grant
Window in thin polishing pad
- Patent number 11,826,875
- Issue date Nov 28, 2023
- Applied Materials, Inc.
- Yongqi Hu
- B24 - GRINDING POLISHING
Information Patent Grant
Method of making carrier head membrane with regions of different ro...
- Patent number 11,738,421
- Issue date Aug 29, 2023
- Applied Materials, Inc.
- Young J. Paik
- B24 - GRINDING POLISHING
Information Patent Grant
Edge ring for a substrate processing chamber
- Patent number 11,417,561
- Issue date Aug 16, 2022
- Applied Materials, Inc.
- Govinda Raj
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrostatic chuck optimized for refurbishment
- Patent number 11,179,965
- Issue date Nov 23, 2021
- Applied Materials, Inc.
- Vijay D. Parkhe
- B44 - DECORATIVE ARTS
Information Patent Grant
Window in thin polishing pad
- Patent number 11,161,218
- Issue date Nov 2, 2021
- Applied Materials, Inc.
- Yongqi Hu
- B24 - GRINDING POLISHING
Information Patent Grant
Carrier head membrane with regions of different roughness
- Patent number 11,007,619
- Issue date May 18, 2021
- Applied Materials, Inc.
- Young J. Paik
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laminated top plate of a workpiece carrier in micromechanical and s...
- Patent number 10,636,690
- Issue date Apr 28, 2020
- Applied Materials, Inc.
- Kadthala R. Narendrnath
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Edge ring for a substrate processing chamber
- Patent number 10,553,473
- Issue date Feb 4, 2020
- Applied Materials, Inc.
- Govinda Raj
- B33 - ADDITIVE MANUFACTURING TECHNOLOGY
Information Patent Grant
Retaining ring for lower wafer defects
- Patent number 10,399,202
- Issue date Sep 3, 2019
- Applied Materials, Inc.
- Yongqi Hu
- B24 - GRINDING POLISHING
Information Patent Grant
Method of placing window in thin polishing pad
- Patent number 10,213,894
- Issue date Feb 26, 2019
- Applied Materials, Inc.
- Yongqi Hu
- B24 - GRINDING POLISHING
Information Patent Grant
Thermal radiation barrier for substrate processing chamber components
- Patent number 10,177,014
- Issue date Jan 8, 2019
- Applied Materials, Inc.
- Govinda Raj
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Carrier head membrane roughness to control polishing rate
- Patent number 10,160,093
- Issue date Dec 25, 2018
- Applied Materials, Inc.
- Young J. Paik
- B24 - GRINDING POLISHING
Information Patent Grant
Methods for bonding substrates
- Patent number 10,131,126
- Issue date Nov 20, 2018
- Applied Materials, Inc.
- Kadthala Ramaya Narendrnath
- B32 - LAYERED PRODUCTS
Information Patent Grant
Electrostatic chuck optimized for refurbishment
- Patent number 10,056,284
- Issue date Aug 21, 2018
- Applied Materials, Inc.
- Vijay D. Parkhe
- B24 - GRINDING POLISHING
Information Patent Grant
Corrosion resistant abatement system
- Patent number 10,005,025
- Issue date Jun 26, 2018
- Applied Materials, Inc.
- Govinda Raj
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Printed chemical mechanical polishing pad having printed window
- Patent number 9,993,907
- Issue date Jun 12, 2018
- Applied Materials, Inc.
- Laxman Murugesh
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Methods of selective layer deposition
- Patent number 9,716,012
- Issue date Jul 25, 2017
- Applied Materials, Inc.
- David Thompson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate support assembly having metal bonded protective layer
- Patent number 9,685,356
- Issue date Jun 20, 2017
- Applied Materials, Inc.
- Vijay D. Parkhe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck refurbishment
- Patent number 9,669,653
- Issue date Jun 6, 2017
- Applied Materials, Inc.
- Vijay D. Parkhe
- B44 - DECORATIVE ARTS
Information Patent Grant
Methods for bonding substrates
- Patent number 9,627,231
- Issue date Apr 18, 2017
- Applied Materials, Inc.
- Kadthala Ramaya Narendrnath
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pad design for electrostatic chuck surface
- Patent number 9,613,846
- Issue date Apr 4, 2017
- Applied Materials, Inc.
- Govinda Raj
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for refurbishing an electrostatic chuck with reduced plasma...
- Patent number 9,202,736
- Issue date Dec 1, 2015
- Applied Materials, Inc.
- Kadthala Ramaya Narendrnath
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Leak proof pad for CMP endpoint detection
- Patent number 8,662,957
- Issue date Mar 4, 2014
- Applied Materials, Inc.
- Young J. Paik
- B24 - GRINDING POLISHING
Information Patent Grant
Carrier head membrane
- Patent number 8,475,231
- Issue date Jul 2, 2013
- Applied Materials, Inc.
- Young J. Paik
- B24 - GRINDING POLISHING
Information Patent Grant
Measuring flow properties of multiple gas nozzles of a gas distributor
- Patent number 8,464,594
- Issue date Jun 18, 2013
- Applied Materials, Inc.
- Kadthala R. Narendrnath
- G01 - MEASURING TESTING
Information Patent Grant
Method to substantially enhance shelf life of hygroscopic component...
- Patent number 8,225,927
- Issue date Jul 24, 2012
- Applied Materials, Inc.
- Kadthala R. Narendrnath
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support having barrier capable of detecting fluid leakage
- Patent number 6,913,670
- Issue date Jul 5, 2005
- Applied Materials, Inc.
- Kadthala R. Narendrnath
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrostatic chuck having composite dielectric layer and method of...
- Patent number 6,721,162
- Issue date Apr 13, 2004
- Applied Materials Inc.
- Edwin C. Weldon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fabricating an electrostatic chuck having plasma resistant gas cond...
- Patent number 6,581,275
- Issue date Jun 24, 2003
- Applied Materials Inc.
- Kadthala R. Narendrnath
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MODULATING THERMAL CONDUCTIVITY TO CONTROL COOLING OF SHOWERHEAD
- Publication number 20240417854
- Publication date Dec 19, 2024
- LAM RESEARCH CORPORATION
- Troy GOMM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Carrier Head Membrane With Regions of Different Roughness
- Publication number 20230356353
- Publication date Nov 9, 2023
- Applied Materials, Inc.
- Young J. Paik
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WINDOW IN THIN POLISHING PAD
- Publication number 20220023990
- Publication date Jan 27, 2022
- Applied Materials, Inc.
- Yongqi Hu
- B24 - GRINDING POLISHING
Information Patent Application
PRINTING CHEMICAL MECHANICAL POLISHING PAD HAVING WINDOW OR CONTROL...
- Publication number 20210245322
- Publication date Aug 12, 2021
- Applied Materials, Inc.
- Laxman Murugesh
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
Method of Making Carrier Head Membrane With Regions of Different Ro...
- Publication number 20210245323
- Publication date Aug 12, 2021
- Applied Materials, Inc.
- Young J. Paik
- B24 - GRINDING POLISHING
Information Patent Application
3D PRINTED CHAMBER COMPONENTS CONFIGURED FOR LOWER FILM STRESS AND...
- Publication number 20200365374
- Publication date Nov 19, 2020
- Applied Materials, Inc.
- Kadthala R. NARENDRNATH
- B22 - CASTING POWDER METALLURGY
Information Patent Application
EDGE RING FOR A SUBSTRATE PROCESSING CHAMBER
- Publication number 20200161165
- Publication date May 21, 2020
- Applied Materials, Inc.
- Govinda RAJ
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Window in Thin Polishing Pad
- Publication number 20190152017
- Publication date May 23, 2019
- Applied Materials, Inc.
- Yongqi Hu
- B24 - GRINDING POLISHING
Information Patent Application
Carrier Head Membrane With Regions of Different Roughness
- Publication number 20190118336
- Publication date Apr 25, 2019
- Applied Materials, Inc.
- Young J. Paik
- B24 - GRINDING POLISHING
Information Patent Application
ELECTROSTATIC CHUCK OPTIMIZED FOR REFURBISHMENT
- Publication number 20180319205
- Publication date Nov 8, 2018
- Applied Materials, Inc.
- Vijay D. Parkhe
- B44 - DECORATIVE ARTS
Information Patent Application
PRINTING CHEMICAL MECHANICAL POLISHING PAD HAVING WINDOW OR CONTROL...
- Publication number 20180236632
- Publication date Aug 23, 2018
- Laxman Murugesh
- B24 - GRINDING POLISHING
Information Patent Application
LAMINATED TOP PLATE OF A WORKPIECE CARRIER IN MICROMECHANICAL AND S...
- Publication number 20180025932
- Publication date Jan 25, 2018
- Kadthala R. Narendrnath
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT ASSEMBLY
- Publication number 20170345691
- Publication date Nov 30, 2017
- Applied Materials, Inc.
- Vijay D. Parkhe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT ASSEMBLY HAVING METAL BONDED PROTECTIVE LAYER
- Publication number 20170271179
- Publication date Sep 21, 2017
- Applied Materials, Inc.
- Vijay D. Parkhe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK OPTIMIZED FOR REFURBISHMENT
- Publication number 20170250101
- Publication date Aug 31, 2017
- Applied Materials, Inc.
- Vijay D. Parkhe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WINDOW IN THIN POLISHING PAD
- Publication number 20170246722
- Publication date Aug 31, 2017
- Applied Materials, Inc.
- Yongqi Hu
- B24 - GRINDING POLISHING
Information Patent Application
METHODS FOR BONDING SUBSTRATES
- Publication number 20170173934
- Publication date Jun 22, 2017
- Applied Materials, Inc.
- Kadthala Ramaya NARENDRNATH
- B32 - LAYERED PRODUCTS
Information Patent Application
RETAINING RING FOR LOWER WAFER DEFECTS
- Publication number 20160271750
- Publication date Sep 22, 2016
- Applied Materials, Inc.
- Yongqi HU
- B24 - GRINDING POLISHING
Information Patent Application
3D PRINTED CHAMBER COMPONENTS CONFIGURED FOR LOWER FILM STRESS AND...
- Publication number 20160233060
- Publication date Aug 11, 2016
- Applied Materials, Inc.
- Kadthala R. NARENDRNATH
- B33 - ADDITIVE MANUFACTURING TECHNOLOGY
Information Patent Application
EDGE RING FOR A SUBSTRATE PROCESSING CHAMBER
- Publication number 20160181142
- Publication date Jun 23, 2016
- Applied Materials, Inc.
- Govinda RAJ
- B33 - ADDITIVE MANUFACTURING TECHNOLOGY
Information Patent Application
CORROSION RESISTANT ABATEMENT SYSTEM
- Publication number 20160107117
- Publication date Apr 21, 2016
- Applied Materials, Inc.
- Govinda RAJ
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Cyclic Spike Anneal Chemical Exposure For Low Thermal Budget Proces...
- Publication number 20150275364
- Publication date Oct 1, 2015
- Applied Materials, Inc.
- David Thompson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRINTED CHEMICAL MECHANICAL POLISHING PAD HAVING CONTROLLED POROSITY
- Publication number 20150174826
- Publication date Jun 25, 2015
- Applied Materials, Inc.
- Laxman Murugesh
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
Methods Of Selective Layer Deposition
- Publication number 20150162214
- Publication date Jun 11, 2015
- Applied Materials, Inc.
- David Thompson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PAD DESIGN FOR ELECTROSTATIC CHUCK SURFACE
- Publication number 20150146339
- Publication date May 28, 2015
- Applied Materials, Inc.
- Govinda RAJ
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK REFURBISHMENT
- Publication number 20140263176
- Publication date Sep 18, 2014
- Applied Materials, Inc.
- Vijay D. Parkhe
- B44 - DECORATIVE ARTS
Information Patent Application
THERMAL RADIATION BARRIER FOR SUBSTRATE PROCESSING CHAMBER COMPONENTS
- Publication number 20140165915
- Publication date Jun 19, 2014
- Govinda RAJ
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT ASSEMBLY HAVING METAL BONDED PROTECTIVE LAYER
- Publication number 20140159325
- Publication date Jun 12, 2014
- Applied Materials, Inc.
- Vijay D. Parkhe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR BONDING SUBSTRATES
- Publication number 20140099485
- Publication date Apr 10, 2014
- Kadthala Ramaya NARENDRNATH
- B32 - LAYERED PRODUCTS
Information Patent Application
MEASURING FLOW PROPERTIES OF MULTIPLE GAS NOZZLES OF A GAS DISTRIBUTOR
- Publication number 20110217208
- Publication date Sep 8, 2011
- Applied Materials, Inc.
- Kadthala R. NARENDRNATH
- G01 - MEASURING TESTING

Kadthala Ramaya NARENDRNATH

Person

Patents Grantslast 30 patents

Carrier head membrane with regions of different roughness

Window in thin polishing pad

Method of making carrier head membrane with regions of different ro...

Edge ring for a substrate processing chamber

Electrostatic chuck optimized for refurbishment

Window in thin polishing pad

Carrier head membrane with regions of different roughness

Laminated top plate of a workpiece carrier in micromechanical and s...

Edge ring for a substrate processing chamber

Retaining ring for lower wafer defects

Method of placing window in thin polishing pad

Thermal radiation barrier for substrate processing chamber components

Carrier head membrane roughness to control polishing rate

Methods for bonding substrates

Electrostatic chuck optimized for refurbishment

Corrosion resistant abatement system

Printed chemical mechanical polishing pad having printed window

Methods of selective layer deposition

Substrate support assembly having metal bonded protective layer

Electrostatic chuck refurbishment

Methods for bonding substrates

Pad design for electrostatic chuck surface

Method for refurbishing an electrostatic chuck with reduced plasma...

Leak proof pad for CMP endpoint detection

Carrier head membrane

Measuring flow properties of multiple gas nozzles of a gas distributor

Method to substantially enhance shelf life of hygroscopic component...

Substrate support having barrier capable of detecting fluid leakage

Electrostatic chuck having composite dielectric layer and method of...

Fabricating an electrostatic chuck having plasma resistant gas cond...

Patents Applicationslast 30 patents

MODULATING THERMAL CONDUCTIVITY TO CONTROL COOLING OF SHOWERHEAD

Carrier Head Membrane With Regions of Different Roughness

WINDOW IN THIN POLISHING PAD

PRINTING CHEMICAL MECHANICAL POLISHING PAD HAVING WINDOW OR CONTROL...

Method of Making Carrier Head Membrane With Regions of Different Ro...

3D PRINTED CHAMBER COMPONENTS CONFIGURED FOR LOWER FILM STRESS AND...

EDGE RING FOR A SUBSTRATE PROCESSING CHAMBER

Window in Thin Polishing Pad

Carrier Head Membrane With Regions of Different Roughness

ELECTROSTATIC CHUCK OPTIMIZED FOR REFURBISHMENT

PRINTING CHEMICAL MECHANICAL POLISHING PAD HAVING WINDOW OR CONTROL...

LAMINATED TOP PLATE OF A WORKPIECE CARRIER IN MICROMECHANICAL AND S...

SUBSTRATE SUPPORT ASSEMBLY

SUBSTRATE SUPPORT ASSEMBLY HAVING METAL BONDED PROTECTIVE LAYER

ELECTROSTATIC CHUCK OPTIMIZED FOR REFURBISHMENT

WINDOW IN THIN POLISHING PAD

METHODS FOR BONDING SUBSTRATES

RETAINING RING FOR LOWER WAFER DEFECTS

3D PRINTED CHAMBER COMPONENTS CONFIGURED FOR LOWER FILM STRESS AND...

EDGE RING FOR A SUBSTRATE PROCESSING CHAMBER

CORROSION RESISTANT ABATEMENT SYSTEM

Cyclic Spike Anneal Chemical Exposure For Low Thermal Budget Proces...

PRINTED CHEMICAL MECHANICAL POLISHING PAD HAVING CONTROLLED POROSITY

Methods Of Selective Layer Deposition

PAD DESIGN FOR ELECTROSTATIC CHUCK SURFACE

ELECTROSTATIC CHUCK REFURBISHMENT

THERMAL RADIATION BARRIER FOR SUBSTRATE PROCESSING CHAMBER COMPONENTS

SUBSTRATE SUPPORT ASSEMBLY HAVING METAL BONDED PROTECTIVE LAYER

METHODS FOR BONDING SUBSTRATES

MEASURING FLOW PROPERTIES OF MULTIPLE GAS NOZZLES OF A GAS DISTRIBUTOR