Kae KUMAGAI

Person

Miyagi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus for processing a substrate
- Patent number 12,074,009
- Issue date Aug 27, 2024
- Tokyo Electron Limited
- Yuki Iijima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for processing a substrate
- Patent number 12,020,904
- Issue date Jun 25, 2024
- Tokyo Electron Limited
- Yuki Iijima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and substrate processing system
- Patent number 11,996,296
- Issue date May 28, 2024
- Tokyo Electron Limited
- Kae Kumagai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,545,355
- Issue date Jan 3, 2023
- Tokyo Electron Limited
- Kae Kumagai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for processing a substrate
- Patent number 11,201,062
- Issue date Dec 14, 2021
- Tokyo Electron Limited
- Yuki Iijima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for formation of protective sidewall layer for...
- Patent number 11,171,012
- Issue date Nov 9, 2021
- Tokyo Electron Limited
- Ryutaro Suda
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ETCHING METHOD
- Publication number 20230268191
- Publication date Aug 24, 2023
- TOKYO ELECTRON LIMITED
- Maju TOMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20230215700
- Publication date Jul 6, 2023
- TOKYO ELECTRON LIMITED
- Kae KUMAGAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD AND ETCHING APPARATUS
- Publication number 20230215691
- Publication date Jul 6, 2023
- TOKYO ELECTRON LIMITED
- Ryutaro SUDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20230122980
- Publication date Apr 20, 2023
- TOKYO ELECTRON LIMITED
- Kae KUMAGAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220359167
- Publication date Nov 10, 2022
- TOKYO ELECTRON LIMITED
- Takatoshi ORUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20220157616
- Publication date May 19, 2022
- TOKYO ELECTRON LIMITED
- Kae KUMAGAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR PROCESSING A SUBSTRATE
- Publication number 20220093406
- Publication date Mar 24, 2022
- TOKYO ELECTRON LIMITED
- Yuki IIJIMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR FORMATION OF PROTECTIVE SIDEWALL LAYER FOR...
- Publication number 20210375633
- Publication date Dec 2, 2021
- TOKYO ELECTRON LIMITED
- Ryutaro SUDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210143004
- Publication date May 13, 2021
- TOKYO ELECTRON LIMITED
- Kae KUMAGAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR PROCESSING A SUBSTRATE
- Publication number 20200411325
- Publication date Dec 31, 2020
- TOKYO ELECTRON LIMITED
- Yuki IIJIMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Kae KUMAGAI

Person

Patents Grantslast 30 patents

Apparatus for processing a substrate

Apparatus for processing a substrate

Substrate processing method and substrate processing system

Substrate processing method and substrate processing apparatus

Method and apparatus for processing a substrate

Method and apparatus for formation of protective sidewall layer for...

Patents Applicationslast 30 patents

ETCHING METHOD

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

ETCHING METHOD AND ETCHING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM

METHOD AND APPARATUS FOR PROCESSING A SUBSTRATE

METHOD AND APPARATUS FOR FORMATION OF PROTECTIVE SIDEWALL LAYER FOR...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

METHOD AND APPARATUS FOR PROCESSING A SUBSTRATE