Kai Chen

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Kanagawa, JP

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Patents Grantslast 30 patents

Information Patent Grant
Axis determination apparatus, film-thickness measurement apparatus,...
- Patent number 6,753,964
- Issue date Jun 22, 2004
- Ulvac, Inc.
- Kai Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for measuring the thickness of a thin film having eddy cu...
- Patent number 6,700,370
- Issue date Mar 2, 2004
- Ulvac, Inc.
- Kai Chen
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Axis determination apparatus, film-thickness measurement apparatus,...
- Publication number 20020071129
- Publication date Jun 13, 2002
- ULVAC, Inc.
- Kai Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus for measuring the thickness of a thin film
- Publication number 20020053904
- Publication date May 9, 2002
- ULVAC, Inc.
- Kai Chen
- G01 - MEASURING TESTING