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New Taipei City, TW
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last 30 patents
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Patent Grant
Track spin wafer chuck
Patent number
8,616,539
Issue date
Dec 31, 2013
Taiwan Semiconductor Manufacturing Co., Ltd.
Wei-Hsiang Tseng
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Patents Applications
last 30 patents
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Patent Application
Track Spin Wafer Chuck
Publication number
20130156947
Publication date
Jun 20, 2013
Taiwan Semiconductor Manufacturing Co., LTD
Wei-Hsiang Tseng
H01 - BASIC ELECTRIC ELEMENTS