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Jena, DE
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last 30 patents
Information
Patent Grant
Arrangement for generating extreme ultraviolet radiation from a pla...
Patent number
7,599,470
Issue date
Oct 6, 2009
Xtreme technologies GmbH
Diethard Kloepfel
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Device and method for generating extreme ultraviolet (EUV) radiation
Patent number
7,476,884
Issue date
Jan 13, 2009
Xtreme technologies GmbH
Kai Gaebel
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Arrangement for providing target material for the generation of sho...
Patent number
7,405,413
Issue date
Jul 29, 2008
Xtreme technologies GmbH
Guido Hergenhan
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Arrangement for providing a reproducible target flow for the energy...
Patent number
7,372,057
Issue date
May 13, 2008
Xtreme technologies GmbH
Kai Gaebel
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Collector mirror for plasma-based, short-wavelength radiation sources
Patent number
7,329,014
Issue date
Feb 12, 2008
Xtreme technologies GmbH
Istvan Balogh
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Apparatus for the temporally stable generation of EUV radiation by...
Patent number
7,274,030
Issue date
Sep 25, 2007
Xtreme technologies GmbH
Guido Hergenhan
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method and arrangement for the plasma-based generation of intensive...
Patent number
7,250,621
Issue date
Jul 31, 2007
Xtreme technologies GmbH
Kai Gaebel
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Radiation source for the generation of short-wavelength radiation
Patent number
7,233,013
Issue date
Jun 19, 2007
Xtreme technologies GmbH
Guido Hergenhan
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Arrangement for the generation of a pulsed laser beam of high avera...
Patent number
7,218,651
Issue date
May 15, 2007
Xtreme technologies GmbH
Guido Hergenhan
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Method and arrangement for the plasma-based generation of soft x-ra...
Patent number
7,161,163
Issue date
Jan 9, 2007
Xtreme technologies GmbH
Kai Gaebel
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Arrangement for the stabilization of the radiation emission of a pl...
Patent number
7,122,814
Issue date
Oct 17, 2006
Xtreme technologies GmbH
Guido Hergenhan
G01 - MEASURING TESTING
Information
Patent Grant
Arrangement for the generation of intensive short-wave radiation ba...
Patent number
6,995,382
Issue date
Feb 7, 2006
Xtreme technologies GmbH
Christian Ziener
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Radiation source for generating extreme ultraviolet radiation
Patent number
6,882,704
Issue date
Apr 19, 2005
Xtreme technologies GmbH
Guido Schriever
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
ARRANGEMENT FOR GENERATING EXTREME ULTRAVIOLET RADIATION FROM A PLA...
Publication number
20080067456
Publication date
Mar 20, 2008
XTREME technologies GmbH;
DIETHARD KLOEPFEL
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Plasma radiation source
Publication number
20060226377
Publication date
Oct 12, 2006
XTREME technologies GmbH;
Guido Hergenhan
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Collector mirror for plasma-based, short-wavelength radiation sources
Publication number
20060227826
Publication date
Oct 12, 2006
XTREME technologies GmbH;
Istvan Balogh
B82 - NANO-TECHNOLOGY
Information
Patent Application
Radiation source for the generation of short-wavelength radiation
Publication number
20060219959
Publication date
Oct 5, 2006
XTREME technologies GmbH;
Guido Hergenhan
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Device and method for generating extreme ultraviolet (EUV) radiation
Publication number
20060192157
Publication date
Aug 31, 2006
XTREME technologies GmbH;
Kai Gaebel
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Arrangement for the generation of a pulsed laser beam of high avera...
Publication number
20060140232
Publication date
Jun 29, 2006
XTREME technologies GmbH;
Guido Hergenhan
B82 - NANO-TECHNOLOGY
Information
Patent Application
Arrangement for providing a reproducible target flow for the energy...
Publication number
20060043319
Publication date
Mar 2, 2006
XTREME technologies GmbH;
Kai Gaebel
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Arrangement for providing target material for the generation of sho...
Publication number
20060024216
Publication date
Feb 2, 2006
XTREME technologies GmbH;
Guido Hergenhan
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Apparatus for the temporally stable generation of EUV radiation by...
Publication number
20050274912
Publication date
Dec 15, 2005
XTREME technologies GmbH;
Guido Hergenhan
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method and arrangement for the plasma-based generation of intensive...
Publication number
20050258768
Publication date
Nov 24, 2005
XTREME technologies GmbH;
Kai Gaebel
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method and arrangement for the plasma-based generation of soft x-ra...
Publication number
20050169429
Publication date
Aug 4, 2005
XTREME technologies GmbH;
Kai Gaebel
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Arrangement for the stabilization of the radiation emission of a pl...
Publication number
20040195529
Publication date
Oct 7, 2004
Guido Hergenhan
G01 - MEASURING TESTING
Information
Patent Application
Arrangement for the generation of intensive short-wave radiation ba...
Publication number
20040159802
Publication date
Aug 19, 2004
Christian Ziener
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Radiation source for generating extreme ultraviolet radiation
Publication number
20040135517
Publication date
Jul 15, 2004
XTREME technologies GmbH;
Guido Schriever
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR