Kai Tak Lam

Person

Hsinchu City, TW

People

Patents Grantslast 30 patents

Information Patent Grant
System and method for performing extreme ultraviolet photolithograp...
- Patent number 12,174,545
- Issue date Dec 24, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tai-Yu Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography thermal control
- Patent number 12,096,544
- Issue date Sep 17, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tai-Yu Chen
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Reduction of cracks in passivation layer
- Patent number 12,087,714
- Issue date Sep 10, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Kuo-An Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and manufacturing method thereof
- Patent number 11,855,192
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Han-Yu Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for performing extreme ultraviolet photolithograp...
- Patent number 11,768,437
- Issue date Sep 26, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tai-Yu Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography thermal control
- Patent number 11,647,578
- Issue date May 9, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tai-Yu Chen
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
System and method for performing extreme ultraviolet photolithograp...
- Patent number 11,392,040
- Issue date Jul 19, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Tai-Yu Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Field effect transistors with ferroelectric dielectric materials
- Patent number 11,282,940
- Issue date Mar 22, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Cheng-Ming Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Field effect transistors with ferroelectric dielectric materials
- Patent number 10,707,320
- Issue date Jul 7, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Cheng-Ming Lin
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
LITHOGRAPHY THERMAL CONTROL
- Publication number 20240389215
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tai-Yu CHEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
REDUCTION OF CRACKS IN PASSIVATION LAYER
- Publication number 20240379593
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Kuo-An Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20240097011
- Publication date Mar 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Han-Yu LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR PERFORMING EXTREME ULTRAVIOLET PHOTOLITHOGRAP...
- Publication number 20230367225
- Publication date Nov 16, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tai-Yu CHEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ACOUSTIC PARTICLE DEFLECTION IN LITHOGRAPHY TOOL
- Publication number 20230333491
- Publication date Oct 19, 2023
- TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
- Tai-Yu Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY THERMAL CONTROL
- Publication number 20230284366
- Publication date Sep 7, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tai-Yu CHEN
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
REDUCTION OF CRACKS IN PASSIVATION LAYER
- Publication number 20230145953
- Publication date May 11, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Kuo-An Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHY THERMAL CONTROL
- Publication number 20230065403
- Publication date Mar 2, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tai-Yu CHEN
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SYSTEM AND METHOD FOR PERFORMING EXTREME ULTRAVIOLET PHOTOLITHOGRAP...
- Publication number 20220350257
- Publication date Nov 3, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tai-Yu CHEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20220173224
- Publication date Jun 2, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Han-Yu LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR PERFORMING EXTREME ULTRAVIOLET PHOTOLITHOGRAP...
- Publication number 20210349396
- Publication date Nov 11, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tai-Yu CHEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Field Effect Transistors with Ferroelectric Dieletric Materials
- Publication number 20200335599
- Publication date Oct 22, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Cheng-Ming Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Field Effect Transistors with Ferroelectric Dielectric Materials
- Publication number 20200127111
- Publication date Apr 23, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Cheng-Ming Lin
- H01 - BASIC ELECTRIC ELEMENTS

Kai Tak Lam

Person

Patents Grantslast 30 patents

System and method for performing extreme ultraviolet photolithograp...

Lithography thermal control

Reduction of cracks in passivation layer

Semiconductor device and manufacturing method thereof

System and method for performing extreme ultraviolet photolithograp...

Lithography thermal control

System and method for performing extreme ultraviolet photolithograp...

Field effect transistors with ferroelectric dielectric materials

Field effect transistors with ferroelectric dielectric materials

Patents Applicationslast 30 patents

LITHOGRAPHY THERMAL CONTROL

REDUCTION OF CRACKS IN PASSIVATION LAYER

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

SYSTEM AND METHOD FOR PERFORMING EXTREME ULTRAVIOLET PHOTOLITHOGRAP...

ACOUSTIC PARTICLE DEFLECTION IN LITHOGRAPHY TOOL

LITHOGRAPHY THERMAL CONTROL

REDUCTION OF CRACKS IN PASSIVATION LAYER

LITHOGRAPHY THERMAL CONTROL

SYSTEM AND METHOD FOR PERFORMING EXTREME ULTRAVIOLET PHOTOLITHOGRAP...

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

SYSTEM AND METHOD FOR PERFORMING EXTREME ULTRAVIOLET PHOTOLITHOGRAP...

Field Effect Transistors with Ferroelectric Dieletric Materials

Field Effect Transistors with Ferroelectric Dielectric Materials