Kai-Uwe Berroth

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Heldenfingen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Optical assembly, projection exposure apparatus and projection obje...
- Patent number 7,768,721
- Issue date Aug 3, 2010
- Carl Zeiss SMT AG
- Jochen Weber
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
OPTICAL ASSEMBLY, PROJECTION EXPOSURE APPARATUS AND PROJECTION OBJE...
- Publication number 20080316621
- Publication date Dec 25, 2008
- Jochen Weber
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY