Kailash K. Patalay

Person

Santa Clara, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing system having susceptorless substrate support...
- Patent number 10,610,884
- Issue date Apr 7, 2020
- Applied Materials, Inc.
- Joseph M. Ranish
- C30 - CRYSTAL GROWTH
Information Patent Grant
Substrate processing system having susceptorless substrate support...
- Patent number 10,376,916
- Issue date Aug 13, 2019
- Applied Materials, Inc.
- Joseph M. Ranish
- C30 - CRYSTAL GROWTH
Information Patent Grant
Model based lamp background filtration of stray radiation for pyrom...
- Patent number 10,345,155
- Issue date Jul 9, 2019
- Applied Materials, Inc.
- Kailash Kiran Patalay
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Absorbing reflector for semiconductor processing chamber
- Patent number 10,306,708
- Issue date May 28, 2019
- Applied Materials, Inc.
- Kin Pong Lo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Absorbing reflector for semiconductor processing chamber
- Patent number 9,832,816
- Issue date Nov 28, 2017
- Applied Materials, Inc.
- Kin Pong Lo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Quartz upper and lower domes
- Patent number 9,768,043
- Issue date Sep 19, 2017
- Applied Materials, Inc.
- Anzhong Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Model based lamp background filtration of stray radiation for pyrom...
- Patent number 9,739,666
- Issue date Aug 22, 2017
- Applied Materials, Inc.
- Kailash Kiran Patalay
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system having susceptorless substrate support...
- Patent number 9,682,398
- Issue date Jun 20, 2017
- Applied Materials, Inc.
- Joseph M. Ranish
- C30 - CRYSTAL GROWTH
Information Patent Grant
Substrate support for use with multi-zonal heating sources
- Patent number 9,570,328
- Issue date Feb 14, 2017
- APPLIED MATERIALS, INC.
- Kailash Patalay
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low temperature measurement and control using low temperature pyrom...
- Patent number 8,967,860
- Issue date Mar 3, 2015
- Applied Materials, Inc.
- Kailash Kiran Patalay
- G01 - MEASURING TESTING
Information Patent Grant
Wafer processing hardware for epitaxial deposition with reduced bac...
- Patent number 8,951,351
- Issue date Feb 10, 2015
- Applied Materials, Inc.
- Kailash Kiran Patalay
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer processing hardware for epitaxial deposition with reduced aut...
- Patent number 8,852,349
- Issue date Oct 7, 2014
- Applied Materials, Inc.
- Juan Chacin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for pedestal adjustment
- Patent number 8,747,560
- Issue date Jun 10, 2014
- Applied Materials, Inc.
- Richard Collins
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Semiconductor process chamber vision and monitoring system
- Patent number 8,726,837
- Issue date May 20, 2014
- Applied Materials, Inc.
- Kailash K. Patalay
- G02 - OPTICS
Information Patent Grant
Use of infrared camera for real-time temperature monitoring and con...
- Patent number 8,724,976
- Issue date May 13, 2014
- Applied Materials, Inc.
- Nir Merry
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Independent radiant gas preheating for precursor disassociation con...
- Patent number 8,663,390
- Issue date Mar 4, 2014
- Applied Materials, Inc.
- David Keith Carlson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus to enhance process gas temperature in a CVD re...
- Patent number 8,512,472
- Issue date Aug 20, 2013
- Applied Materials, Inc.
- Jean R. Vatus
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Non-contact substrate support position sensing system and correspon...
- Patent number 8,441,640
- Issue date May 14, 2013
- Applied Materials, Inc.
- Kailash Kiran Patalay
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
System and method for pedestal adjustment
- Patent number 8,398,777
- Issue date Mar 19, 2013
- Applied Materials, Inc.
- Richard O. Collins
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Use of infrared camera for real-time temperature monitoring and con...
- Patent number 8,150,242
- Issue date Apr 3, 2012
- Applied Materials, Inc.
- Nir Merry
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pyrometry for substrate processing
- Patent number 8,147,137
- Issue date Apr 3, 2012
- Applied Materials, Inc.
- Kailash Kiran Patalay
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Independent radiant gas preheating for precursor disassociation con...
- Patent number 7,976,634
- Issue date Jul 12, 2011
- Applied Materials, Inc.
- David Keith Carlson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for improved azimuthal thermal uniformity of a substrate
- Patent number 7,964,038
- Issue date Jun 21, 2011
- Applied Materials, Inc.
- Kailash Kiran Patalay
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
ABSORBING REFLECTOR FOR SEMICONDUCTOR PROCESSING CHAMBER
- Publication number 20180084610
- Publication date Mar 22, 2018
- Applied Materials, Inc.
- Kin Pong LO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODEL BASED LAMP BACKGROUND FILTRATION OF STRAY RADIATION FOR PYROM...
- Publication number 20180045575
- Publication date Feb 15, 2018
- Applied Materials, Inc.
- Kailash Kiran PATALAY
- G01 - MEASURING TESTING
Information Patent Application
QUARTZ UPPER AND LOWER DOMES
- Publication number 20180005856
- Publication date Jan 4, 2018
- Applied Materials, Inc.
- Anzhong CHANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INDEPENDENT RADIANT GAS PREHEATING FOR PRECURSOR DISASSOCIATION CON...
- Publication number 20170362702
- Publication date Dec 21, 2017
- Applied Materials, Inc.
- David Keith CARLSON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING SYSTEM HAVING SUSCEPTORLESS SUBSTRATE SUPPORT...
- Publication number 20170259294
- Publication date Sep 14, 2017
- JOSEPH M. RANISH
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING SYSTEM HAVING SUSCEPTORLESS SUBSTRATE SUPPORT...
- Publication number 20160243580
- Publication date Aug 25, 2016
- Applied Materials, Inc.
- JOSEPH M. RANISH
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
MODEL BASED LAMP BACKGROUND FILTRATION OF STRAY RADIATION FOR PYROM...
- Publication number 20150023385
- Publication date Jan 22, 2015
- Applied Materials, Inc.
- Kailash Kiran PATALAY
- G01 - MEASURING TESTING
Information Patent Application
ABSORBING REFLECTOR FOR SEMICONDUCTOR PROCESSING CHAMBER
- Publication number 20140376898
- Publication date Dec 25, 2014
- Kin Pong Lo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATED LINER ASSEMBLY FOR A SEMICONDUCTOR PROCESSING CHAMBER
- Publication number 20140345526
- Publication date Nov 27, 2014
- Applied Materials, Inc.
- Joseph M. RANISH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATED LINER ASSEMBLY FOR A SEMICONDUCTOR PROCESSING CHAMBER
- Publication number 20140345525
- Publication date Nov 27, 2014
- Applied Materials, Inc.
- Joseph M. RANISH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
QUARTZ UPPER AND LOWER DOMES
- Publication number 20140199056
- Publication date Jul 17, 2014
- Anzhong CHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INDEPENDENT RADIANT GAS PREHEATING FOR PRECURSOR DISASSOCIATION CON...
- Publication number 20140175054
- Publication date Jun 26, 2014
- Applied Materials, Inc.
- David Keith CARLSON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING SYSTEM HAVING SUSCEPTORLESS SUBSTRATE SUPPORT...
- Publication number 20130256962
- Publication date Oct 3, 2013
- Applied Materials, Inc.
- JOSEPH M. RANISH
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SYSTEM AND METHOD FOR PEDESTAL ADJUSTMENT
- Publication number 20130152859
- Publication date Jun 20, 2013
- Applied Materials, Inc.
- Richard O. Collins
- C30 - CRYSTAL GROWTH
Information Patent Application
APPARATUS FOR DEPOSITION OF MATERIALS ON A SUBSTRATE
- Publication number 20120270384
- Publication date Oct 25, 2012
- Applied Materials, Inc.
- ERROL ANTONIO C. SANCHEZ
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW TEMPERATURE MEASUREMENT AND CONTROL USING LOW TEMPERATURE PYROM...
- Publication number 20120201267
- Publication date Aug 9, 2012
- Applied Materials, Inc.
- KAILASH Kiran PATALAY
- G01 - MEASURING TESTING
Information Patent Application
USE OF INFRARED CAMERA FOR REAL-TIME TEMPERATURE MONITORING AND CON...
- Publication number 20120183915
- Publication date Jul 19, 2012
- Applied Materials, Inc.
- Nir Merry
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORT FOR USE WITH MULTI-ZONAL HEATING SOURCES
- Publication number 20120003599
- Publication date Jan 5, 2012
- Applied Materials, Inc.
- KAILASH PATALAY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INDEPENDENT RADIANT GAS PREHEATING FOR PRECURSOR DISASSOCIATION CON...
- Publication number 20110259432
- Publication date Oct 27, 2011
- David Keith Carlson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PYROMETRY FOR SUBSTRATE PROCESSING
- Publication number 20100124248
- Publication date May 20, 2010
- Applied Materials, Inc.
- KAILASH KIRAN PATALAY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS TO ENHANCE PROCESS GAS TEMPERATURE IN A CVD RE...
- Publication number 20100120259
- Publication date May 13, 2010
- Applied Materials, Inc.
- JEAN R. VATUS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
USE OF INFRARED CAMERA FOR REAL-TIME TEMPERATURE MONITORING AND CON...
- Publication number 20100111511
- Publication date May 6, 2010
- Nir Merry
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR IMPROVED AZIMUTHAL THERMAL UNIFORMITY OF...
- Publication number 20100086784
- Publication date Apr 8, 2010
- Applied Materials, Inc.
- KAILASH KIRAN PATALAY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CVD REACTOR WITH MULTIPLE PROCESSING LEVELS AND DUAL-AXIS MOTORIZED...
- Publication number 20100075488
- Publication date Mar 25, 2010
- Applied Materials, Inc.
- Richard O. Collins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESS CHAMBER VISION AND MONITORING SYSTEM
- Publication number 20090314205
- Publication date Dec 24, 2009
- Kailash K. Patalay
- G02 - OPTICS
Information Patent Application
SYSTEM AND METHOD FOR PEDESTAL ADJUSTMENT
- Publication number 20090272719
- Publication date Nov 5, 2009
- Applied Materials, Inc.
- Richard O. Collins
- C30 - CRYSTAL GROWTH
Information Patent Application
NON-CONTACT SUBSTRATE SUPPORT POSITION SENSING SYSTEM AND CORRESPON...
- Publication number 20090276097
- Publication date Nov 5, 2009
- Applied Materials, Inc.
- Kailash Kiran Patalay
- C30 - CRYSTAL GROWTH
Information Patent Application
Independent Radiant Gas Preheating for Precursor Disassociation Con...
- Publication number 20080210163
- Publication date Sep 4, 2008
- David Keith Carlson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER PROCESSING HARDWARE FOR EPITAXIAL DEPOSITION WITH REDUCED BAC...
- Publication number 20080066684
- Publication date Mar 20, 2008
- Applied Materials, Inc.
- KAILASH KIRAN PATALAY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Wafer processing hardware for epitaxial deposition with reduced aut...
- Publication number 20080069951
- Publication date Mar 20, 2008
- Juan Chacin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Kailash K. Patalay

Person

Patents Grantslast 30 patents

Substrate processing system having susceptorless substrate support...

Substrate processing system having susceptorless substrate support...

Model based lamp background filtration of stray radiation for pyrom...

Absorbing reflector for semiconductor processing chamber

Absorbing reflector for semiconductor processing chamber

Quartz upper and lower domes

Model based lamp background filtration of stray radiation for pyrom...

Substrate processing system having susceptorless substrate support...

Substrate support for use with multi-zonal heating sources

Low temperature measurement and control using low temperature pyrom...

Wafer processing hardware for epitaxial deposition with reduced bac...

Wafer processing hardware for epitaxial deposition with reduced aut...

System and method for pedestal adjustment

Semiconductor process chamber vision and monitoring system

Use of infrared camera for real-time temperature monitoring and con...

Independent radiant gas preheating for precursor disassociation con...

Method and apparatus to enhance process gas temperature in a CVD re...

Non-contact substrate support position sensing system and correspon...

System and method for pedestal adjustment

Use of infrared camera for real-time temperature monitoring and con...

Pyrometry for substrate processing

Independent radiant gas preheating for precursor disassociation con...

Apparatus for improved azimuthal thermal uniformity of a substrate

Patents Applicationslast 30 patents

ABSORBING REFLECTOR FOR SEMICONDUCTOR PROCESSING CHAMBER

MODEL BASED LAMP BACKGROUND FILTRATION OF STRAY RADIATION FOR PYROM...

QUARTZ UPPER AND LOWER DOMES

INDEPENDENT RADIANT GAS PREHEATING FOR PRECURSOR DISASSOCIATION CON...

SUBSTRATE PROCESSING SYSTEM HAVING SUSCEPTORLESS SUBSTRATE SUPPORT...

SUBSTRATE PROCESSING SYSTEM HAVING SUSCEPTORLESS SUBSTRATE SUPPORT...

MODEL BASED LAMP BACKGROUND FILTRATION OF STRAY RADIATION FOR PYROM...

ABSORBING REFLECTOR FOR SEMICONDUCTOR PROCESSING CHAMBER

COATED LINER ASSEMBLY FOR A SEMICONDUCTOR PROCESSING CHAMBER

COATED LINER ASSEMBLY FOR A SEMICONDUCTOR PROCESSING CHAMBER

QUARTZ UPPER AND LOWER DOMES

INDEPENDENT RADIANT GAS PREHEATING FOR PRECURSOR DISASSOCIATION CON...

SUBSTRATE PROCESSING SYSTEM HAVING SUSCEPTORLESS SUBSTRATE SUPPORT...

SYSTEM AND METHOD FOR PEDESTAL ADJUSTMENT

APPARATUS FOR DEPOSITION OF MATERIALS ON A SUBSTRATE

LOW TEMPERATURE MEASUREMENT AND CONTROL USING LOW TEMPERATURE PYROM...

USE OF INFRARED CAMERA FOR REAL-TIME TEMPERATURE MONITORING AND CON...

SUBSTRATE SUPPORT FOR USE WITH MULTI-ZONAL HEATING SOURCES

INDEPENDENT RADIANT GAS PREHEATING FOR PRECURSOR DISASSOCIATION CON...

PYROMETRY FOR SUBSTRATE PROCESSING

METHOD AND APPARATUS TO ENHANCE PROCESS GAS TEMPERATURE IN A CVD RE...

USE OF INFRARED CAMERA FOR REAL-TIME TEMPERATURE MONITORING AND CON...

METHODS AND APPARATUS FOR IMPROVED AZIMUTHAL THERMAL UNIFORMITY OF...

CVD REACTOR WITH MULTIPLE PROCESSING LEVELS AND DUAL-AXIS MOTORIZED...

SEMICONDUCTOR PROCESS CHAMBER VISION AND MONITORING SYSTEM

SYSTEM AND METHOD FOR PEDESTAL ADJUSTMENT

NON-CONTACT SUBSTRATE SUPPORT POSITION SENSING SYSTEM AND CORRESPON...

Independent Radiant Gas Preheating for Precursor Disassociation Con...

WAFER PROCESSING HARDWARE FOR EPITAXIAL DEPOSITION WITH REDUCED BAC...

Wafer processing hardware for epitaxial deposition with reduced aut...