Kaiqu Ang

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Shanghai, CN

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Patents Grantslast 30 patents

Information Patent Grant
Wafer transfer module and method thereof for transferring to-be-tra...
- Patent number 11,972,963
- Issue date Apr 30, 2024
- Shanghai Huali Integrated Circuit Corporation
- Yu Ren
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL

Patents Applicationslast 30 patents

Information Patent Application
Method for Improving Stability of Etching Rate of Etching Chamber
- Publication number 20230162995
- Publication date May 25, 2023
- SHANGHAI HUALI MICROELECTRONICS CORPORATION
- Kaiqu Ang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM PUMPING VALVE FOR SEMICONDUCTOR EQUIPMENT AND VACUUM CONTROL...
- Publication number 20220165576
- Publication date May 26, 2022
- Shanghai Huali Integrated Circuit Corporation
- Yu Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer Transfer Module and Method Thereof for Transferring To-Be-Tra...
- Publication number 20220139749
- Publication date May 5, 2022
- Shanghai Huali Integrated Circuit Corporation
- Yu Ren
- H01 - BASIC ELECTRIC ELEMENTS