Kalman Pelhos

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method for etching an etch layer
- Patent number 11,171,011
- Issue date Nov 9, 2021
- Lam Research Corporation
- Eric Hudson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mask shrink layer for high aspect ratio dielectric etch
- Patent number 10,431,458
- Issue date Oct 1, 2019
- Lam Research Corporation
- Eric A. Hudson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Technique to deposit metal-containing sidewall passivation for high...
- Patent number 10,170,323
- Issue date Jan 1, 2019
- Lam Research Corporation
- Eric A. Hudson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Technique to deposit metal-containing sidewall passivation for high...
- Patent number 9,620,377
- Issue date Apr 11, 2017
- Lab Research Corporation
- Eric A. Hudson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mask shrink layer for high aspect ratio dielectric etch
- Patent number 9,543,148
- Issue date Jan 10, 2017
- Lam Research Corporation
- Eric A. Hudson
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR ETCHING AN ETCH LAYER
- Publication number 20220028696
- Publication date Jan 27, 2022
- LAM RESEARCH CORPORATION
- Eric HUDSON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR ETCHING AN ETCH LAYER
- Publication number 20200066540
- Publication date Feb 27, 2020
- LAM RESEARCH CORPORATION
- Eric HUDSON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUE TO DEPOSIT METAL-CONTAINING SIDEWALL PASSIVATION FOR HIGH...
- Publication number 20170170026
- Publication date Jun 15, 2017
- LAM RESEARCH CORPORATION
- Eric A. Hudson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MASK SHRINK LAYER FOR HIGH ASPECT RATIO DIELECTRIC ETCH
- Publication number 20170076945
- Publication date Mar 16, 2017
- LAM RESEARCH CORPORATION
- Eric A. Hudson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUE TO DEPOSIT METAL-CONTAINING SIDEWALL PASSIVATION FOR HIGH...
- Publication number 20160163558
- Publication date Jun 9, 2016
- LAM RESEARCH CORPORATION
- Eric A. Hudson
- H01 - BASIC ELECTRIC ELEMENTS