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Kalyan Kumar MANKALA
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Hamden, CT, US
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Patents Grants
last 30 patents
Information
Patent Grant
Lithographic apparatus and illumination uniformity correction system
Patent number
11,656,555
Issue date
May 23, 2023
ASML Holding N.V.
Janardan Nath
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Linear motor magnetic shield apparatus for lithographic systems
Patent number
9,136,751
Issue date
Sep 15, 2015
ASML Holding N.V.
Kalyan Kumar Mankala
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Linear motor magnetic shield apparatus
Patent number
9,130,443
Issue date
Sep 8, 2015
ASML Holding N.V.
Kalyan Kumar Mankala
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Patents Applications
last 30 patents
Information
Patent Application
LITHOGRAPHIC METHOD TO ENHANCE ILLUMINATOR TRANSMISSION
Publication number
20240353756
Publication date
Oct 24, 2024
ASML NETHERLANDS B.V.
Todd R. DOWNEY
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
FAST UNIFORMITY DRIFT CORRECTION
Publication number
20240319608
Publication date
Sep 26, 2024
ASML Holding N.V.
Roberto B. WIENER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND ILLUMINATION UNIFORMITY CORRECTION SYSTEM
Publication number
20220214622
Publication date
Jul 7, 2022
ASML Holding N.V.
Janardan NATH
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Linear Motor Magnetic Shield Apparatus
Publication number
20130010273
Publication date
Jan 10, 2013
ASML Holding N.V.
Kalyan Kumar MANKALA
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Application
Linear Motor Magnetic Shield Apparatus
Publication number
20100165311
Publication date
Jul 1, 2010
ASML Holding N.V.
Kalyan Kumar MANKALA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY