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Kamen Hristov Chilov
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Eindhoven, NL
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last 30 patents
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Patent Grant
Optimal rasterization for maskless lithography
Patent number
8,009,269
Issue date
Aug 30, 2011
ASML Holding N.V.
Kars Zeger Troost
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, device manufacturing method, device manufac...
Patent number
7,321,416
Issue date
Jan 22, 2008
ASML Netherlands B.V.
Martinus Cornelis Reijnen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Optimal Rasterization for Maskless Lithography
Publication number
20080224251
Publication date
Sep 18, 2008
ASML Holding N.V.
Kars Zeger Troost
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, device manufacturing method, device manufac...
Publication number
20060285094
Publication date
Dec 21, 2006
ASML NETHERLANDS B.V.
Martinus Cornelis Reijnen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY