Kameshwar Poolla

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Berkeley, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Methods of and apparatuses for controlling process profiles
- Patent number 7,403,834
- Issue date Jul 22, 2008
- Regents of the University of California
- Kameshwar Poolla
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for low distortion parameter measurements
- Patent number 7,299,148
- Issue date Nov 20, 2007
- OnWafer Technologies, Inc.
- Dean Hunt
- G01 - MEASURING TESTING
Information Patent Grant
Methods and apparatus for equipment matching and characterization
- Patent number 7,212,950
- Issue date May 1, 2007
- OnWafer Technologies, Inc.
- Kameshwar Poolla
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Methods of and apparatus for controlling process profiles
- Patent number 7,016,754
- Issue date Mar 21, 2006
- OnWafer Technologies, Inc.
- Kameshwar Poolla
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for deriving thermal flux data for processing...
- Patent number 6,907,364
- Issue date Jun 14, 2005
- OnWafer Technologies, Inc.
- Kameshwar Poolla
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Methods of and apparatuses for controlling process profiles
- Publication number 20060089740
- Publication date Apr 27, 2006
- Kameshwar Poolla
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods and apparatus for low distortion parameter measurements
- Publication number 20060052969
- Publication date Mar 9, 2006
- Dean Hunt
- G01 - MEASURING TESTING
Information Patent Application
Sensor methods and apparatus
- Publication number 20050028049
- Publication date Feb 3, 2005
- Kameshwar Poolla
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods of and apparatus for controlling process profiles
- Publication number 20040249604
- Publication date Dec 9, 2004
- Kameshwar Poolla
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods and apparatus for equipment matching and characterization
- Publication number 20040131226
- Publication date Jul 8, 2004
- Kameshwar Poolla
- G05 - CONTROLLING REGULATING
Information Patent Application
Methods and apparatus for deriving thermal flux data for processing...
- Publication number 20040107066
- Publication date Jun 3, 2004
- Kameshwar Poolla
- G01 - MEASURING TESTING
Information Patent Application
Sensor geometry correction methods and apparatus
- Publication number 20020177916
- Publication date Nov 28, 2002
- Kameshwar Poolla
- G01 - MEASURING TESTING