Kan Chen

Person

  • Fremont, CA, US

Patents Grantslast 30 patents

  • Information Patent Grant

    Detecting defects on a wafer

    • Patent number 9,053,527
    • Issue date Jun 9, 2015
    • KLA-Tencor Corp.
    • Jun Lang
    • G01 - MEASURING TESTING

Patents Applicationslast 30 patents

  • Information Patent Application

    Detecting Defects on a Wafer

    • Publication number 20140185919
    • Publication date Jul 3, 2014
    • KLA-Tencor Corporation
    • Jun Lang
    • G01 - MEASURING TESTING