Kan Ota

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Bedford, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chuck shielding mechanism
- Patent number 9,611,540
- Issue date Apr 4, 2017
- Axcelis Technologies, Inc.
- Kan Ota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Effective algorithm for warming a twist axis for cold ion implantat...
- Patent number 8,481,969
- Issue date Jul 9, 2013
- Axcelis Technologies, Inc.
- Kan Ota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low-inertia multi-axis multi-directional mechanically scanned ion i...
- Patent number 8,227,768
- Issue date Jul 24, 2012
- Axcelis Technologies, Inc.
- Theodore Smick
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Mechanical oscillator for wafer scan with spot beam
- Patent number 7,119,343
- Issue date Oct 10, 2006
- Axcelis Technologies, Inc.
- Mehran Asdigha
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Work piece transfer system for an ion beam implanter
- Patent number 6,987,272
- Issue date Jan 17, 2006
- Axcelis Technologies, Inc.
- Kan Ota
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
EFFECTIVE ALGORITHM FOR WARMING A TWIST AXIS FOR COLD ION IMPLANTAT...
- Publication number 20110297845
- Publication date Dec 8, 2011
- Axcelis Technologies, Inc.
- Kan Ota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK SHIELDING MECHANISM
- Publication number 20100159153
- Publication date Jun 24, 2010
- Axcelis Technologies, Inc.
- Kan Ota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW-INERTIA MULTI-AXIS MULTI-DIRECTIONAL MECHANICALLY SCANNED ION I...
- Publication number 20090321631
- Publication date Dec 31, 2009
- Axcelis Technologies, Inc.
- Theodore Smick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Mechanical oscillator for wafer scan with spot beam
- Publication number 20050247891
- Publication date Nov 10, 2005
- Mehran Asdigha
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Work piece transfer system for an ion beam implanter
- Publication number 20050194549
- Publication date Sep 8, 2005
- Kan Ota
- H01 - BASIC ELECTRIC ELEMENTS