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last 30 patents
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Patent Grant
Method of measuring pattern shape, method of manufacturing semicond...
Patent number
8,227,265
Issue date
Jul 24, 2012
Renesas Electronics Corporation
Kana Nemoto
G01 - MEASURING TESTING
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last 30 patents
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METHOD OF MEASURING PATTERN SHAPE, METHOD OF MANUFACTURING SEMICOND...
Publication number
20110020956
Publication date
Jan 27, 2011
Renesas Electronics Corporation
Kana NEMOTO
G01 - MEASURING TESTING