Kanefumi Nakahara

Person

Yokohama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Photomask case, transporting apparatus, and transporting method
- Patent number 6,499,935
- Issue date Dec 31, 2002
- Nikon Corporation
- Shinichi Hirakawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing exposure apparatus and method for exposing...
- Patent number 6,473,157
- Issue date Oct 29, 2002
- Nikon Corporation
- Kanefumi Nakahara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Master plate transporting system
- Patent number 6,184,970
- Issue date Feb 6, 2001
- Nikon Corporation
- Kanefumi Nakahara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of carrying and aligning a substrate
- Patent number 6,048,655
- Issue date Apr 11, 2000
- Nikon Corporation
- Kanefumi Nakahara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Case for housing a substrate
- Patent number 5,743,409
- Issue date Apr 28, 1998
- Nikon Corporation
- Kanefumi Nakahara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for and method of carrying a substrate
- Patent number 5,498,118
- Issue date Mar 12, 1996
- Nikon Corporation
- Kanefumi Nakahara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 5,442,163
- Issue date Aug 15, 1995
- Nikon Corporation
- Kanefumi Nakahara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Exposure apparatus, and device manufacturing method
- Publication number 20040017556
- Publication date Jan 29, 2004
- Nikon Corporation
- Kanefumi Nakahara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, lithography system and conveying method, and de...
- Publication number 20020024647
- Publication date Feb 28, 2002
- Nikon Corporation
- Kanefumi Nakahara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Kanefumi Nakahara

Person

Patents Grantslast 30 patents

Photomask case, transporting apparatus, and transporting method

Method of manufacturing exposure apparatus and method for exposing...

Master plate transporting system

Method of carrying and aligning a substrate

Case for housing a substrate

Apparatus for and method of carrying a substrate

Exposure apparatus

Patents Applicationslast 30 patents

Exposure apparatus, and device manufacturing method

Exposure apparatus, lithography system and conveying method, and de...