Kaneo Kageyama

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Hitachinaka, JP

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Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam scanning method and charged particle beam app...
- Patent number 7,598,497
- Issue date Oct 6, 2009
- Hitachi High-Technologies Corporation
- Kouichi Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam irradiation apparatus and irradiation method...
- Patent number 6,693,288
- Issue date Feb 17, 2004
- Hitachi, Ltd.
- Kaneo Kageyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam irradiation apparatus and irradiation method...
- Patent number 6,323,498
- Issue date Nov 27, 2001
- Hitachi, Ltd.
- Kaneo Kageyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope
- Patent number 5,659,174
- Issue date Aug 19, 1997
- Hitachi, Ltd.
- Noriyuki Kaneoka
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Charged particle beam scanning method and charged particle beam app...
- Publication number 20080054187
- Publication date Mar 6, 2008
- Hitachi High-Technologies Corporation
- Kouichi Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS