Kang Jia

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Fremont, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus for accurate endpoint detection in supported polishing pads
- Patent number 6,641,470
- Issue date Nov 4, 2003
- Lam Research Corporation
- Eugene Y. Zhao
- B24 - GRINDING POLISHING
Information Patent Grant
Disk processing chuck
- Patent number 6,145,849
- Issue date Nov 14, 2000
- Komag, Incorporated
- Peter S. Bae
- B24 - GRINDING POLISHING