Kang-Yi Lin

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Greenbelt, MD, US

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Patents Grantslast 30 patents

Information Patent Grant
Leveraging precursor molecular composition and structure for atomic...
- Patent number 11,171,013
- Issue date Nov 9, 2021
- University of Maryland, College Park
- Gottlieb S. Oehrlein
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Achieving etching selectivity for atomic layer etching processes by...
- Patent number 10,790,157
- Issue date Sep 29, 2020
- University of Maryland, College Park
- Gottlieb S. Oehrlein
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Leveraging Precursor Molecular Composition and Structure for Atomic...
- Publication number 20200335352
- Publication date Oct 22, 2020
- University of Maryland
- Gottlieb S. Oehrlein
- H01 - BASIC ELECTRIC ELEMENTS